An Open-Loop Method for Point-to-Point Positioning of a Piezoelectric Actuator

  • Published : 2007.04.01


We describe how to control a piezoelectric actuator using the open-loop method for point-to-point positioning. Since piezoelectric actuators have nonlinear characteristics due to hysteresis and creep between the input voltage and the resulting displacement, a special method is required to eliminate this nonlinearity for an open-loop drive. We have introduced open-loop driving methods for piezoelectric actuators in the past, which required a large input voltage and an initializing motion sequence to reset the state of the actuator before each movement. In this paper, we propose a new driving method that uses the initializing state. This method also utilizes the overshoot from both the upward and downward stepwise drives. Applying this method., we obtained precise point-to-point positioning without the influence of hysteresis and creep.



  1. Liu, Y. T., Fung, R. F. and Wang, C. C., 'Precision Position Control Using Combined Piezo-VCM Actuator,' Precision Engineering, Vol. 29, No. 4, pp. 411-422, 2005
  2. Li, Y., Guo, M., Zhou, Z. and Hu, M., 'Micro Electro Discharge Machine with an Inchworm Type of Micro Feed Mechanism,' Precision Engineering, Vol. 26, No. 1, pp. 7-14, 2002
  3. Chu, C. L. and Fan, S. H., 'A Novel Long-Travel Piezoelectric-Drive Linear Nanopositioning Stage,' Precision Engineering, Vol. 30, No. 1, pp. 85-95, 2006
  4. Henmi, N., 'A Six-Degrees of Freedom Fine Motion Mechanism,' International Progress in Precision Engineering (Proceedings of the 7th IPES), Butterworth-Heinemann, pp. 53-61, 1993
  5. Kaizuka, H. and Siu, B., 'A Simple Way to Reduce Hysteresis and Creep when Using Piezoelectric Actuators,' Japanese Journal of Applied Physics, Vol. 27, No. 5, pp. 773-774, 1988
  6. Furutani, K., Urushibata, M. and Mohri, N., 'Displacement Control of Piezoelectric Element by Feedback of Induced Charge,' Nanotechnology, Vol. 9, No. 2, pp. 93-98, 1998
  7. Henmi, N. and Tanaka, M., 'A Study on Open-Loop Positioning Method for Piezoelectric Actuator,' Proceedings of the 3rd International Workshop on Advanced Mechatronics, pp. 74-77, 1999
  8. Henmi, N., Matsusue, A., Tanaka, M. and Shinkai, D., 'A Study on Open-Loop Drive for Piezoelectric Actuators-Improvement of Positioning Accuracy and Repeatability,' Proceedings of the International Conference on Mechatronics and Information Technology, pp. 340-344, 2001