International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles

  • Hwang, Joo-Ho (Intelligent Machine Research Center, Korea Institute of Machinery and Materials) ;
  • Park, Chun-Hong (Intelligent Machine Research Center, Korea Institute of Machinery and Materials) ;
  • Kim, Seung-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • Published : 2007.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

Aerostatic planar XY stages are frequently used as the main frames of precision positioning systems. The machining and assembly process of the rails and bed of the stage is one of first processes performed when the system is built. When the system is complete, the 2D position, motion, and stage flatness errors are measured in tests. If the stage errors exceed the application requirements, the stage must be remachined and the assembly process must be repeated. This is difficult and time-consuming work. In this paper, a method for estimating the errors of a planar XY stage is proposed that can be applied when the rails and bed of the stage are evaluated. Profile measurements, estimates of the motion error, and 2D position estimation models were considered. A comparison of experimental results and our estimates indicated that the estimated errors were within $1{\mu}m$ of their true values. Thus, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage is expected to be a useful tool during the assembly process of guideways.

Keywords

References

  1. Hwang, J., Park C. H., Gao, W. and Kim, S. W., 'A three-probe method for measuring parallelism and straightness of a pair of rails for ultra precision machine tools,' Proceedings of the ASPE 2005 Annual Meeting, pp. 315-318, 2005
  2. Park, C. H. and Lee, H., 'Motion error analysis of the porous air bearing stage using the transfer function,' Journal of the KSPE, Vol. 21, No. 7, pp. 185-194, 2004
  3. Hwang, J., Park, C. H., Lee, C. H. and Kim, S. W., 'Estimation and correction method for the two-dimensional position errors of a planar XY stage based on motion error measurements,' International Journal of Machine Tools and Manufacture, Vol. 46, pp. 801-810, 2006 https://doi.org/10.1016/j.ijmachtools.2005.07.021
  4. Donaldson, R. R., 'A simple method for separating spindle error from test ball roundness error,' Annual CIRP, Vol. 21, pp. 125-126, 1972
  5. Estler, W. T., 'Calibration and use of optical straightedges in the metrology of precision machines,' Optical Engineering, Vol. 24, pp. 372-379, 1985
  6. Evans, C. J., Hocken, R. J. and Estler, W. T., 'Self-calibration: Reversal, redundancy, error separation and absolute testing,' Annual CIRP, Vol. 45, pp. 617-624, 1996 https://doi.org/10.1016/S0007-8506(07)60515-0
  7. Tanaka, H., Tazawa, K., Sato, H., O-hori, M. and Sekiguchi, H., 'Application of a new straightness measurement method to large machine tools,' Annual CIRP, Vol. 30, pp. 455-459, 1981 https://doi.org/10.1016/S0007-8506(07)60977-9
  8. Tazawa, K., Sato, H. and O-hori, M., 'A new method for the measurement of the straightness of machine tools and machined work,' ASME Journal of Mechanical Design, Vol. 104, pp. 587-592, 1982 https://doi.org/10.1115/1.3256390
  9. Kiyono, S. and Gao, W., 'Profile measurement of machined surface with a new differential method,' Precision Engineering, Vol. 16, pp. 212-218, 1994 https://doi.org/10.1016/0141-6359(94)90127-9
  10. Gao, W. and Kiyono, S., 'High accuracy profile measurement of a machined surface by the combined method,' Measurement, Vol. 19, pp. 55-64, 1996 https://doi.org/10.1016/S0263-2241(96)00066-8
  11. Makosch, G. and Drollinger, B., 'Surface profile measurement with a scanning differential AC interferometer,' Applied Optics, Vol. 23-24, pp. 4544-4553, 1984
  12. Tanaka, H. and Sato, H., 'Extensive analysis and development of straightness measurement by sequential two-point method,' Transactions of the ASME, Vol. 108, pp. 176-182, 1986 https://doi.org/10.1115/1.3187061
  13. Fung, E. H. K. and Yang, S. M., 'An approach to on-machine motion error measurement of a linear slide,' Measurement, Vol. 29, pp. 51-62, 2001 https://doi.org/10.1016/S0263-2241(00)00027-0
  14. Kounosu, K. and Kishi, T., 'Measurement of surface profile using smoothed serial three point method,' Journal of JSPE, Vol. 61, pp. 641-645, 1995
  15. Gao, W. and Kiyono, S., 'On-machine measurement of machined surface using the combined three-point method,' JSME International Journal, Vol. 40, pp. 253-259, 1997 https://doi.org/10.1299/jsmec.40.253
  16. Gao, W., Yokoyama, J., Kojima, H. and Kiyono, S., 'Precision measurement of cylinder straightness using a scanning multiprobe system,' Precision Engineering, Vol. 26, pp. 279-288, 2002 https://doi.org/10.1016/S0141-6359(02)00106-X
  17. Yamaguchi, K., 'Measurement of straight motion accuracy using the improved sequential three-point method,' Journal of the JSPE, Vol. 59, pp. 773-778, 1993
  18. Furukawa, M., Gao, W., Shimizu, H., Kiyono, S., Yasutake, M. and Takahashi, K., 'Three-dimensional slit width measurement for long precision slot die,' Key Engineering Materials, Vol. 295-296, pp. 343-348, 2005 https://doi.org/10.4028/www.scientific.net/KEM.295-296.295
  19. Gao, W., Yokoyama, J., Kiyono, S. and Hitomi, N., 'A scanning multi-probe straightness measurement system for alignment of linear collider accelerator,' Key Engineering Materials, Vol. 295-296, pp. 253-258, 2005 https://doi.org/10.4028/www.scientific.net/KEM.295-296.295