Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Photothermal and Photochemical Investigation on Laser Ablation of the Polyimide by 355nm UV Laser Processing

355nm UV 레이저 가공에 의한 폴리이미드의 광화학적 및 광열적 어블레이션에 관한 연구

  • Published : 2007.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

UV laser ablation of polyimide is a combination of photochemical and photothermal mechanism. Photochemical mechanism is that molecular bonds are broken by photon energy and photothermal is evaporation and melt expulsion. When the laser processing, the etching depth needs to be calculated for prediction of processing result. In this paper, in order to predict the laser etching depth of polyimide by UV laser with the wavelength of 355nm, the theoretical model which includes both the photothermal and the photochemical effect was introduced. The model parameters were obtained by comparing with experimental results. The 3rd harmonic $Nd:YVO_4$ laser system was used in the experiment. From these experimental and theoretical results, the laser ablation of a polyimide was verified to achieve the highest quality microstructure.

Keywords

References

  1. Kim, J. G., Chang, W. S., Shin, B. S., Chang, J. W. and Whang, K. H., 'Blind via hole drilling using DPSS UV laser,' Journal of Korean Society of Laser Processing, Vol. 6, No.1, pp. 9-16, 2003
  2. Shin, B. S., Kim, J. G., Chang, W. S. and Whang, K. H., 'Rapid manufacturing of 3D micro products by UV laser ablation and phase change filling,' Journal of the Korean Society for Precision Engineering, Vol. 22, No. 11, pp. 196-201, 2005
  3. Shin, B. S., Yang, S. B., Chang, W.S., Kim, J. G. and Kim, J. M., 'Rapid Manufacturing of 3D-Shaped Microstructures by UV Laser Ablation,' Journal of the Korean Society for Precision Engineering, Vol. 21, No.7, pp. 30-36, 2004
  4. Oh, B. K. and Kim, D. S., 'Numerical simulation of nanosecond pulsed laser ablation in air,' Journal of Korean Society of Laser Processing, Vol. 6, No.3, pp. 37-45, 2003
  5. Bang, S. Y., 'Effects of beam parameters on excimer laser ablation,' Journal of the Korean Society for Precision Engineering, Vol. 22, No.7, pp. 38-46, 2005
  6. Yoon, K. K. and Bang, S. Y., 'Modeling of polymer ablation with excimer lasers,' Journal of the Korean Society for Precision Engineering, Vol. 22, No.9, pp. 60-68, 2005
  7. Srinivasan, V., Smrtic, M. A. and Babu, S. V., 'Excimer Laser Etching of Polymers,' Journal Applied Physics, Vol. 59, No. 11, pp. 3861-3867, 1986 https://doi.org/10.1063/1.336728
  8. Hauer, M., Funk, D. J., Lippert, T. and Wokaun, A., 'Laser ablation of polymers studied by nsinterferometry and ns-shadowgraphy measurements,' Applied Surface Science, Vol. 208-209, pp. 107-112, 2003
  9. Luk'yanchuk, B., Bityurin, N., Himmelbauer, M. and Arnold, N., 'UV-laser ablation of polyimide: from long to ultra-short laser pulses,' Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms, Vol. 122, No. 3, pp. 347-355, 1997 https://doi.org/10.1016/S0168-583X(96)00759-8
  10. Yung, K. C., Zeng, D. W. and Yue, T. M., 'High repetition rate effect on the chemical characteristics and composition of Upilex-S polyimide ablated by a UV Nd:YAG laser,' Surface and Coatings Technology, Vol. 160, No. 1, pp. 1-6, 2002 https://doi.org/10.1016/S0257-8972(02)00384-5
  11. Yung, K. C., Liu, J. S., Man, H. C. and Yue, T. M., '355nm Nd:YAG laser ablation of polyimide and its thermal effect,' Journal of Materials Processing Technology, Vol. 101, No. 1, pp.306-311, 2000 https://doi.org/10.1016/S0924-0136(00)00467-2
  12. Yung, K. C., Zeng, D. W. and Yue, T. M., 'XPS investigation of Upilex-S polyimide ablated by 355nm Nd:YAG laser irradiation,' Applied Surface Science, Vol. 173, No.3, pp. 193-202, 2001 https://doi.org/10.1016/S0169-4332(00)00884-9
  13. Aguilar, C. A., Lu, Y., Mao, S. and Chen, S., 'Direct micro-patterning of biodegradable polymers using ultraviolet and femtosecond lasers,' Biomaterials, Vol. 26, No. 36, pp. 7642-7649, 2005 https://doi.org/10.1016/j.biomaterials.2005.04.053
  14. Bauerle, D., Himmelbauer, M. and Arenholz, E., 'Pulsed laser ablation of polyimide : fundamental aspects,' Journal of Photochemistry and Photobiology A: Chemistry, Vol. 106, No.1, pp. 2730, 1997