Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Effect of Deposition Parameters on the Property of SiC Layer in TRISO-Coated Particles

TRISO 피복 입자에서 증착 조건이 탄화규소층의 특성에 미치는 영향

  • Park, J.H. (Nuclear Materials Technology Development Division, Korea Atomic Energy Research Institute) ;
  • Kim, W.J. (Nuclear Materials Technology Development Division, Korea Atomic Energy Research Institute) ;
  • Park, J.N. (Nuclear Materials Technology Development Division, Korea Atomic Energy Research Institute) ;
  • Park, K.H. (Nuclear Materials Technology Development Division, Korea Atomic Energy Research Institute) ;
  • Park, J.Y. (Nuclear Materials Technology Development Division, Korea Atomic Energy Research Institute) ;
  • Lee, Y.W. (HTGR Fuel Development Division, Korea Atomic Energy Research Institute)
  • 박종훈 (한국원자력연구소 원자력재료기술개발부) ;
  • 김원주 (한국원자력연구소 원자력재료기술개발부) ;
  • 박정남 (한국원자력연구소 원자력재료기술개발부) ;
  • 박경환 (한국원자력연구소 원자력재료기술개발부) ;
  • 박지연 (한국원자력연구소 원자력재료기술개발부) ;
  • 이영우 (한국원자력연구원 입자연료개발부)
  • Published : 2007.03.27
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Abstract

TRISO coatings on $ZrO_{2}$ surrogate kernels were conducted by a fluidized-bed chemical vapor deposition (FBCVD) method. Effects of the deposition temperature and the gas flow rate on the properties of SiC layer were investigated in the TRISO-coated particles. Deposition rate of the SiC layer decreased as the deposition temperature increased in the temperature range of $1460^{\circ}-1550^{\circ}C$. At the deposition temperature of $1550^{\circ}C$ the SiC layer contained an excess carbon, whereas the SiC layers had stoichiometric compositions at $1460^{\circ}C\;and\;1500^{\circ}C$. Hardness and elastic modulus measured by a nanoindentation method were the highest in the SiC layer deposited at $1500^{\circ}C$. The SiC layer deposited at the gas flow rate of 4000 sccm exhibited a high porosity and contained large pores more than $1{\mu}m$, being due to a violent spouting of particles. On the other hand, the SiC layer deposited at 2500 sccm revealed the lowest porosity.

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