Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Effects of ZnO addition on Electrical Resistivity and Optical Transmittance of ITO Thin Film

ITO 박막의 전기저항과 광투과도 특성에 미치는 ZnO 첨가 효과

  • 채홍철 (충북대학교 신소재공학과) ;
  • 홍주화 (충북대학교 신소재공학과)
  • Published : 2007.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

[ $In_2O_3-ZnO(IZO)$ ] and $In_2O_3-ZnO-SnO_2(IZTO)$ thin films were prepared on EAGLE 2000 glass webs in a Ar gas by RF-Magnetron sputtering. Electrical resistivity and optical transmittance of the films were investigated. IZO, IZTO film showed excellent optical transmittance of 85 % at the visible $400{\sim}$780 nm wavelength. Electrical properties of IZO film have $6.50{\times}10^{-4}{\Omega}cm$ (95 $In_2O_3$ : 5 ZnO wt.%) and $5.20{\times}10^{-4}{\Omega}cm$ (90 : 10 wt.%), IZTO film have $8.00{\times}10^{-4}{\Omega}cm$ (90 $In_2O_3$ : 3 ZnO : 7 $SnO_2$ wt.%) and $6.50{\times}10^{-4}{\Omega}cm$ (90 : 7 : 3 wt.%). Substitution of SnO to ZnO in ITO films showed slightly lower electrical conductivity than ITO film but showed similar optical transmittance.

Keywords

References

  1. K. L. Chopra, S. Major, and D. K. Pandya, 'Transparent conductors', Thin Solid Films, Vol. 102, Iss. 1, 8, p. 1, 1983 https://doi.org/10.1016/0040-6090(83)90256-0
  2. F. C. Lin, Y. Takao, Y. Shimizu, and M. Egashira, 'Zinc-oxide varistor gas sensors : I, Effect of $Bi_{2}O_{3}$ content on the $H_{2}$-sensing properties', J. Am. Ceramic Society, Vol. 78, p. 2301, 1995 https://doi.org/10.1111/j.1151-2916.1995.tb08661.x
  3. Wu, M. S., Azuma, A., Shiosaki, T., and Kawabata, A., 'Low-loss ZnO optical waveguides for SAW-AO applications', IEEE Trans, Ultrasonics, Ferroelectrics, Freq. Control, Vol. 36, p. 442, 1989 https://doi.org/10.1109/58.31781
  4. Y. Morinaga, K. Sakuragi, N. Fujimura, and T. 'Effect of Ce doping on the growth of ZnO thin films', J. Crystal Growth, Vol. 174, p. 691, 1997 https://doi.org/10.1016/S0022-0248(97)00045-6
  5. N. Horio, M. Hiramatsu, M. Nawata, K. Imaeda, and T. Torii, 'Preparation of zinc oxide/metal oxide multilayered thin films for low-voltage varistors', Vacuum, Vol. 51, Iss. 4, 1, p. 719, 1998 https://doi.org/10.1016/S0042-207X(98)00293-0
  6. 이세종, 윤형우, 김병섭, 이성욱, 박민우, 곽동주, 'DC 마그네트론 스퍼터법으로 제조한 ZnO:Al 투명전도막의 특성', 대한금속재료학회지, 42권, 9호, 2004
  7. 이광배, 이경행, 주병권, '직류 마그네트론 스퍼터링 방법에 의한 투명 전도성 Ga-doped ZnO 박막 제작 및 최적화', 새물리, 47권, 6호, p. 461, 2003