Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Optical and Structural Properties of TiO2 Thin Films Prepared at Various Oxygen Pressure by Electron-Beam Evaporation

산소 분압에 따라 전자빔 증착법으로 제작된 TiO2 박막의 구조적.광학적 특성

  • Published : 2007.04.25
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Abstract

We prepared $TiO_2$ thin films by electron-beam evaporation at various oxygen pressures, and investigated their optical and structural properties as a function of the annealing temperature. The physical properties of the $TiO_2$ thin films depend upon the injection oxygen content. With the increased injection of oxygen, the phase transformation temperature and the transmittance of $TiO_2$ thin films in the range of visible wavelength were increased. For low injection of oxygen, the absorption edges of $TiO_2$ thin films were more red-shifted when annealed at temperatures from $700^{\circ}C$ to $1100^{\circ}C$.

전자빔 증착법을 이용하여 산소 분압에 따라 $TiO_2$ 박막을 제작하고, 열처리 온도에 따른 박막의 구조적 특성과 광학적 특성을 분석 하였다. $TiO_2$ 박막들의 물리적 특성은 주입된 산소량에 의존하였다. 주입된 산소량이 증가 할수록 상전이 온도가 높아지고, 가시광선 영역에서 $TiO_2$ 박막의 투과율이 증가하였다. 그리고 주입된 산소량이 작은 경우, $700^{\circ}C$에서 $1100^{\circ}C$로 열처리 후 $TiO_2$ 박막의 흡수단 이 좀더 장파장으로 이동하였다.

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References

  1. A. Verma, D. P. Singh, A. K. Bakhshi, and S. A. Agnihotry, 'Influnence of aging and composition of the precursor sol on the properties of $CeO_2-TiO_2$ thin films for electrochromic applications,' J. Non-Cryst. Solids, vol. 351, pp. 2501-2512, 2005 https://doi.org/10.1016/j.jnoncrysol.2005.07.002
  2. J. N. Harta, R. Cervinia, Y. B. Chenga, G. P. Simona, and L. Spicciab, 'Formation of anatase $TiO_2$ by microwave processing,' Sol. Energy Mater. Sol. Cells, vol. 84, pp. 135-143, 2004 https://doi.org/10.1016/j.solmat.2004.02.041
  3. S. W. Lee, D. H. Yang, and T. Kunitake, 'Regioselective imprinting of anthracenecarboxylic acids onto $TiO_2$ gel ultra thin films: an approach to thin film sensor,' Sens. Actuatorsm B: Chemical, vol. 104, pp. 35-42, 2005 https://doi.org/10.1016/j.snb.2004.04.096
  4. A. Bendavida, P. J. Martna, and H. Takikawa, 'Deposition and modification of titanium dioxide thin films by filtered arcdeposition,' Thin Solid Films, vol. 360, pp. 241-249, 2002 https://doi.org/10.1016/S0040-6090(99)00937-2
  5. S. C. Kim, M. C. Heo, E. J. Kim, and S. H. Hahn, 'Photocatalytic activity of Pd-doped $TiO_2$ thin films by using a r.f. magnetron co-sputtering method,' J. Korean Phys. Soc., vol. 47, pp. 700-704, 2005
  6. G. Tian, L. Dong, C. Wei, J. Huang, H. He, and J. Shao, 'Investigation on microstructure and optical properties of titanium dioxide coatings annealed at various temperature,' Opt. Mater., vol. 28, pp. 1058-1063, 2006 https://doi.org/10.1016/j.optmat.2005.06.007
  7. E. Gyorgy, G. Sauthier, A. Figueras, A. Giannoudakos, M. Kompitsas, and I. N. Mihailescu, 'Growth of Au-$TiO_2$ nanocomposite thin films by a dual-laser, dual-target system,' J. Appl. Phys., vol. 100, pp. 114302_1-114302_5, 2006 https://doi.org/10.1063/1.2372450
  8. Shang-Di Mo and W. Y. Ching, 'Electronic and optical properties of three phases of titanium dioxide: Rutile, anatase, and brookite,' Phys. Rev. B, vol. 51, pp. 13023-13032, 1995 https://doi.org/10.1103/PhysRevB.51.13023
  9. E. I. Radeva, I. N. Martev, D. A. Dechev, N. Ivanov, V. N. Tsaneva, and Z. H. Barber, 'Sensitivity to humidity of $TiO_2$ thin films obtained by reactive magnetron sputtering,' Surf. Coat. Tech., vol. 201, pp. 2226-2229, 2006 https://doi.org/10.1016/j.surfcoat.2006.03.027
  10. Y. Guo, X. W. Zhang, and G. R. Han, 'Investigation of structure and properties of N-doped $TiO_2$ thin films grown by APCVD,' Mat. Sci. Eng. B, vol. 135, pp. 83-87, 2006 https://doi.org/10.1016/j.mseb.2006.08.031
  11. J. Y. Kim, D. W. Kim, H. S. Jung, and K. S. Hong, 'Influence of anatase-rutile Phase transformation on dielectric properties of sol-gel derived $TiO_2$ thin films,' Jpn. J. Appl. Phys., vol. 44, pp. 6148-6151, 2005 https://doi.org/10.1143/JJAP.44.6148
  12. Y. U. Ahn, E. J. Kim, H. T. Kim, and S. H. Hahn, 'Variation of structural and optical properties of sol-gel $TiO_2$ thin films with catalyst concentration and calcinations temperature,' Mater. Lett., vol. 57, pp. 4660-4666, 2003 https://doi.org/10.1016/S0167-577X(03)00380-X
  13. S. H. Oh, D. J. Kim, S. H. Hahn, and E. J. Kim, 'Comparison of optical and photocatalytic properties of $TiO_2$ thin films prepared by electron-beam evaporation and sol-gel dipcoating,' Mater. Lett., vol. 57, pp. 4151-4155, 2003 https://doi.org/10.1016/S0167-577X(03)00281-7
  14. M. J. Colgan, B. Djurfors, D. G. Ivey, and M. J. Brett, 'Effects of annealing on titanium dioxide structured films,' Thin Solid Films, vol. 466, pp. 92-96, 2004 https://doi.org/10.1016/j.tsf.2004.02.019
  15. Y. Q. Hou, D. M. Zhuang, G. Zhuang, M. Zaho, and M. S. Wu, 'Influence of annealing temperature on the properties of titanium oxide thin film,' Appl. Surf. Sci., vol. 218, pp. 98-106, 2003 https://doi.org/10.1016/S0169-4332(03)00569-5
  16. M. H. Habibi, N. Talebian, and J. H. Choi, 'The effect of annealing of photocatalytic properties of nanostructured titanium dioxide thin films,' Dyes Pigments, vol. 73, pp. 103-110, 2007 https://doi.org/10.1016/j.dyepig.2005.10.016
  17. K. M. Krishna, M. M. Rahman, T. Miki, T. Soga, K. Igarashi, S. Tanemura, and M. Umeno, 'Optical properties of Pb doped $TiO_2$ nanocrystalline thin films: A photoluminescence spectroscopic study,' Appl. Surf. Sci., vol. 113-114, pp. 149-154, 1997 https://doi.org/10.1016/S0169-4332(96)00873-2
  18. B. D. Cullity, Elements of X-ray Diffraction (Addison- Wesley pub, Notre Dame, 1978)
  19. S. Kitazawa, Y. Choi, S. Yamamoto, and T. Yamaki, 'Rutile and anatase mixed crystal $TiO_2$ thin films prepared by pulsed laser deposition,' Thin Solid Films, vol. 515, pp. 1901-1904, 2006 https://doi.org/10.1016/j.tsf.2006.07.032
  20. B. Huber, A. Brodyanski, M. Scheib, A. Orendorz, C. Ziegler, and H. Gnaser, 'Nanocrystalline anatase $TiO_2$ thin films: preparation and crystallite size-dependent properties,' Thin Solid Films, vol. 472, pp. 114-124, 2005 https://doi.org/10.1016/j.tsf.2004.06.120
  21. R. Sanjines, H. Tang, H. Berger, F. Gozzo, G. Maragaritondo, and F. Levy, 'Electronic structure of anatase $TiO_2$ oxide,' J. Appl. Phys., vol. 75, pp. 2945-2951, 1994 https://doi.org/10.1063/1.356190
  22. Y. Leprince Wang, 'Study of the initial stages of $TiO_2$ growth on Si wafers by XPS,' Surf. Coat. Tech., vol. 150, pp. 257-262, 2002 https://doi.org/10.1016/S0257-8972(01)01541-9