Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication of PZT Tubular Structures by a Template-wetting Process

  • Shaislamov, U.A. (Department of Materials Science and Engineering Kumoh National Institute of Technology) ;
  • Hong, S.K. (Hynix Semiconductor Inc., Memory R&D Division, New Device Team) ;
  • Yang, B. (Department of Materials Science and Engineering Kumoh National Institute of Technology)
  • Published : 2007.05.31
Download PDF
⟨ Previous Next ⟩

Abstract

Nanotubes and microtubes of ferroelectric lead zirconate titanate (PZT) were synthesized by means of a simple and convenient process called a template-wetting process. Nanoporous alumina and macroporous Si were used as template materials to fabricate the corresponding tubes. For the improvement of the wetting properties of the wetting solution, the PZT solution was mixed with a polymer. The polymer was removed completely during annealing. The grain growth processes of the PZT nanotubes during baking and furnace annealing were examined by means of field emission electron microscope (FE-SEM) and X-ray diffractometry (XRD).

Keywords

References

  1. F. D. Morrison, L. Ramsay, and J. F Scott, 'High Aspect Ratio Piezoelectric Stroncium-Bismuth-Tantalate Nanotubes,' J. Phys.: Condens. Matter 15 L527 (2003) https://doi.org/10.1088/0953-8984/15/33/103
  2. B. I. Seo, N, J. Park, S. J. Kim, Y. H. Oh, and B. Yang, 'Nanoscale Orientations of Ferroelectric BLT Films for Nonvolatile Semiconductor Memories,' JKPS, 45 1313-16 (2004)
  3. B. Yang, N. J. Park, B. I. Seo, Y. H. Oh, and S. J. Kim, 'Nanoscale Imaging of Grain Orientations and Ferroelectric domains in $(Bi_{1-x}La_x)_4Ti_3O_{12}$ films for ferroelectric memories,' App. Phys. Lett., 87 (2005)
  4. U. A. Shaislamov, B. I. Seo, S. J. Lee, I. S. Kim, and B. Yang, 'BLT and Pt Nanotubes for High-Density Semiconductor Memories,' JKPS, 47 s595-97 (2005)
  5. P. Go1ring, E. Pippel, H. Hofmeister, R. B. Wehrspohn, M. Steinhart, and U. Go1sele, 'Gold/Carbon Composite Tubes and Gold Nanowires by Impregnating Templates with Hydrogen Tetrachloroaurate/Acetone Solutions,' Nano Lett. 4 1121 (2004) https://doi.org/10.1021/nl049542v
  6. Y. Luo, I. Szafraniak, N. D. Zakharov, V. Nagarajan, M. Steinhart, R. B. Wehrspohn, J. H. Wendorff, R. Ramesh, and M. Alexe, 'Nanoshell Tubes of Ferroelectric Lead Zirconate Titanate and Barium Titanate Nanotubes,' App. Phys. Lett. 83 440 (2003) https://doi.org/10.1063/1.1592013
  7. Y. Luo, S. K. Lee, H. Hofmeister, M.Steinhart, and U. Go1sele, 'Pt Nanoshell Tubes by Template-wetting,' Nano Lett. 4 143 (2004) https://doi.org/10.1021/nl034897k
  8. M. Steinhart, J. H. Wendorff, and R. B. Wehrspohn, CHEMPHYSCHEM 4 1171-76 (2003) https://doi.org/10.1002/cphc.200300733