Applied Microscopy

  • 제37권2호
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  • Pages.111-121
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  • 2007
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  • 2287-5123(pISSN)
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  • 2287-4445(eISSN)
한국현미경학회 (Korean Society of Microscopy)
권호 표지

KBSI-HVEM 대물렌즈의 구면수차 계수 측정

Measurement of Spherical Aberration Coefficient of the Objective Lens in KBSI-HVEM

  • 김영민 (한국기초과학지원연구원 전자현미경연구부) ;
  • 심효식 (지올코리아㈜ 기술지원본부) ;
  • 김윤중 (한국기초과학지원연구원 전자현미경연구부)
  • Kim, Young-Min (Division of Electron Microscopic Research, Korea Basic Science Institute) ;
  • Shim, Hyo-Sik (Technical Support Division, JEOL Korea Ltd.) ;
  • Kim, Youn-Joong (Division of Electron Microscopic Research, Korea Basic Science Institute)
  • 발행 : 2007.06.30
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초록

Diffractogram 법을 이용하여 한국기초과학지원연구원에 설치된 초고전압 투과전자현미경(KBSI-HVEM)의 대물렌즈에 대한 구면수차 계수와 분해능을 측정하였다. 측정 정밀도 향상을 위해 획득한 diffractoram을 디지털 처리하였고 각 intensity 분포 그래프를 graphical curve fitting으로 정밀하게 분리하였다. 정밀 측정을 위한 실험적 고려 사항들을 고찰하였고 최적 실험 조건 도출을 위한 방안들을 본 실험을 통해 제안하였다. 실험적으로 측정된 대물렌즈의 구면수차 계수는 $2.628{\pm}0.04\;mm$였으며 이 값은 제조사에서 대물렌즈 설계 시 제안한 $C_s=2.61\;mm$와 거의 일치하는 값이었다.

Coefficient of spherical aberration of the objective lens in the KBSI-HVEM was evaluated by diffractogram method. Instrumental resolution was also discussed with this method. In order to improve the accuracy, digital processing and graphical curve fitting for intensity profile of diffractogram were employed. Experimental concerns where the optimal procedure of the measurement con be accomplished for this study were discussed. The spherical aberration coefficient $(C_s)$ was estimated to be $2.628{\pm}0.04\;mm$ from this study, which was almost coincident with the value of the manufacture's suggestion $(C_s=2.65\;mm)$.

키워드

참고문헌

  1. Budinger TF, Glaeser RM: Measurement of focus and spherical aberration of an electron microscope objective lens. Ultramicroscopy 2 : 31-41, 1976 https://doi.org/10.1016/S0304-3991(76)90263-1
  2. DM: Digital micrograph version 3.0 manufactured by Gatan. The demonstration program can be downloaded at www. gatan.com and provide full functions except for saving the data
  3. DMSD: Digital micrograph script database, http://www.felmi -zfe.tugraz.at/dm_scripts /dmscript1.html
  4. Hall CE: Method of measuring spherical aberration of an electron microscope objective. J Appl Phys 20 : 631-632, 1949
  5. Hillier J, Baker RF: The observation of crystalline reflections in electron microscope images. Phys Rev 61 : 722-723, 1942 https://doi.org/10.1103/PhysRev.61.722
  6. JEOL: Numerical Calculations of Lens Parameters $(C_s,\;C_e,\;f_o,\;Z_o)$ in the Magnetic field of B(z) along the Z-axis. Unpublished data
  7. KBSI: Installation of an Ultra-High Voltage Transmission Electron Microscope. Ministry of Science and Technology. 98-FA-01-01-A-01, 2003
  8. Krivanek OL: A method for determining the coefficient of spherical aberration from a single electron micrograph. Optik 45 : 97-101, 1976
  9. Kim YM, Jeong JM, Kim JG, Kim YJ, Lim YS: Image processing of atomic resolution transmission electron microscope images. J Korean Phys Soc 48 : 250-255, 2006
  10. O'Keefe MA: 'Resolution' in high-resolution electron microscopy. Ultramicroscopy 47 : 282-297, 1992 https://doi.org/10.1016/0304-3991(92)90203-V
  11. Park GS, Shindo D: Evaluation of a spherical aberration constant of the objective lens of HVEM at Tohoku University. J Electron Microsc 45 : 152-158, 1996 https://doi.org/10.1093/oxfordjournals.jmicro.a023425
  12. Reimer L: Transmission electron microscopy. 3rd Edition: 26-33, 224-239, 1993
  13. Scherzer O: The theoretical resolution limt of the electron microscope. J Appl Phys 20 : 20-29, 1949 https://doi.org/10.1063/1.1698233
  14. Spence JCH: High-resolution electron microscopy. 3rd Edition: 15-47, 89-96, 2003
  15. Thon F, Z. Naturforschg. 20a: 154, 1965