Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Fabrication of a periodically poled MgO : $LiNbO_3$ ridge waveguide for a green laser generation

녹색 광 발진을 위한 주기적 분극 반전된 MgO : $LiNbO_3$ ridge waveguide 제작

  • Yang, W.S. (Nano-Bio Photonics Team, Korea Electronics Technology Institute) ;
  • Kwon, S.W. (Department of Advanced Materials Engineering, Sungkyunkwan University) ;
  • Song, M.K. (Department of Materials Engineering, Korea Aerospace University) ;
  • Lee, H.M. (Nano-Bio Photonics Team, Korea Electronics Technology Institute) ;
  • Kim, W.K. (Nano-Bio Photonics Team, Korea Electronics Technology Institute) ;
  • Koo, K.H. (COMMAX Co.) ;
  • Yoon, D.H. (Department of Advanced Materials Engineering, Sungkyunkwan University) ;
  • Lee, H.Y. (Nano-Bio Photonics Team, Korea Electronics Technology Institute)
  • 양우석 (전자부품연구원 나노바이오포토닉스팀) ;
  • 권순우 (성균관대학교 신소재공학과) ;
  • 송명근 (항공대학교 재료공학과) ;
  • 이형만 (전자부품연구원 나노바이오포토닉스팀) ;
  • 김우경 (전자부품연구원 나노바이오포토닉스팀) ;
  • 구경환 ((주)코맥스) ;
  • 윤대호 (성균관대학교 신소재공학과) ;
  • 이한영 (전자부품연구원 나노바이오포토닉스팀)
  • Published : 2007.08.03
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Abstract

Quasi-phase-matched (QPM) second harmonic generation (SHG) waveguide devices for a green light generation were fabricated by a periodically patterned electrode on the +Z crystal surface and homogeneous LiCl solution using a 5 mol% MgO doped congruent z-cut lithium niobate crystals. Using selective chemical etching, we confirmed the periodic (${\sim}6.8{\mu}m$) domain inverted structure and measured SHG properties of fabricated periodically poled MgO : $LiNbO_3$ ridge-type waveguides.

녹색 광 발진을 위해 조화용융조성의 MgO가 첨가된 $LiNbO_3$ 결정을 이용하여 준위상정합 2차 조화파 도파로 소자를 제작하였다. 도메인 반전을 위해 +Z면에 주기적인 전극 패턴을 형성하였으며, 외부전계의 균일한 인가를 위해 LiCl 전해 용액을 사용하여 도메인을 반전 시켰다. 선택적 화학식각을 통해, 약 $6.8{\mu}m$의 분극 반전 주기를 확인 할 수 있었으며, $7{\mu}m$ ridge 높이와 $3{\mu}m$의 slap높이를 갖는 폭 $5{\mu}m$의 PPMgLN ridge-type 도파로 소자의 비선형 특성을 측정하였다.

Keywords

References

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