대한전자공학회논문지SD (Journal of the Institute of Electronics Engineers of Korea SD)

대한전자공학회 (The Institute of Electronics and Information Engineers)
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산화된 다공질 폴리실리콘 전계방출 소자의 픽셀별 구동 및 특성

A unit pixel drive and field emission characteristics of oxidized porous polysilicon field emission display

  • You, Sung-Won (School of Electrical Engineering and Computer Science Kyungpook National University) ;
  • Kim, Jin-Eui (School of Electrical Engineering and Computer Science Kyungpook National University) ;
  • Choi, Sie-Young (School of Electrical Engineering and Computer Science Kyungpook National University)
  • 발행 : 2007.08.25
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초록

본 논문에서는 산화된 다공질 폴리실리콘을 이용하여 전계 방출 소자를 제작하여, 각각의 픽셀에 따른 전기적 특성과 형광체의 발광 특성을 조사하였다. 실제 대면적 디스플레이 소자에 적용하기 위해서 PM 방식을 이용해서 소자를 픽셀별로 동작하였고, 상부금속 전극의 어레이에 따른 두께와 폭의 공정조건을 확립하였다. 산화된 다공질 폴리실리콘의 미세 구조를 분석하고, 각각의 픽셀에 따른 전계방출 특성을 조사해 보았다. 상부금속 전극의 두께와 폭에 따른 전자방출 특성을 조사해 본 결과 Ti/pt(2nm/7nm)가 가장 적절한 두께라는 것을 확인 할 수 있었고, 2.5 mm 이상 폭에서 전자방출 효율이 증가하는 모습을 확인 할 수 있었다. 각 픽셀에 따른 소자의 전기적 특성은 픽셀마다 조금씩의 차이는 있지만 거의 동일한 누설 전류와 방출 전류가 나타남을 확인할 수 있었고, 동일한 크기의 효율도 관찰할 수 있었다. 누설 전류와 방출 전류는 시간이 증가함에 따라 감소하는 모습이 나타나긴 하였으나, 모든 픽셀이 거의 동일하게 감소하였다. 각각의 픽셀에 따른 휘도는 큰 차이가 없음을 확인할 수 있었고, 20 V에서 $700cd/m^2$ 이상의 높은 휘도를 나타내었으므로 실제 디스플레이 소자로도 응용이 가능할 것이다.

In this paper, we fabricated the field emitter display using oxidized porous polysilicon(OPPS). Their field emission characteristics and the brightness were investigated for each pixel. The OPPS emitter was operated to each pixel using passive matrix for application of large panel display. We set up the proper thickness and width of upper electrode. The fine structure of OPPS was analyzed and the field emission characteristics of each pixel were investigated. As a result of field emission characteristics of different upper electrode thickness and width, we confirmed that the most efficient thickness was 2nm/7nm and increased the emission efficiency over the width of 2.5 mm. Even if field emission characteristics of each pixel was a little different but we confirmed the same leakage current and emission current, emission efficiency at each pixel. The leakage current and emission current was decreased according to the time increases but all of each pixel were uniformly decreased. We confirmed that the brightness of each pixel was not different and the brightness of OPPS field emitter was 700 cd/m2 at the Vps=20 V. Accordingly, the patterned OPPS field emitter can be applied to high quality field emission display devices.

키워드

참고문헌

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