Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Design of Pad Type Air-Bearing for LCD Inspection

LCD 검사 장비용 패드형 에어베어링 설계

  • 오현성 (부산대학교 정밀기계공학과) ;
  • 이상민 (부산대학교 정밀기계공학과) ;
  • 박정우 (부산대학교 나노융합기술학과) ;
  • 김용우 (부산대학교 나노융합기술학과) ;
  • 이득우 (부산대학교 나노융합기술학과)
  • Published : 2007.09.01
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Abstract

LCD (Liquid Crystal Display) is widely used electronic product. It needs too many processes such as PECVD (Plasma Enhanced Vapor Deposition), Sputtering, Photo-lithography, Dry etch. Each process is important but inspection process is more important because most companies emphasis on the six sigma. Recently, LCD inspection system is composed with inlet, inspector, outlet air pads. LCD is inspected on air pad which is shooting air from air hole. This paper studies on pad design of air bearing for LCD inspection to minimize LCD fluctuation. This design is able to reduce fluctuation and then satisfies CCD inspectional range. Also inspection pad needs to adequate stable area.

Keywords

References

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