The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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The Fabrication of On-chip Spiral Inductors Through 3-D Field Analysis

3-D Field 해석을 통한 온칩 나선형 인덕터 제작

  • 이한영 (대림대학 전자정보통신계열) ;
  • 이우철 (을지대 보건과학대 의료공학과)
  • Published : 2007.11.01
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Abstract

In this paper, we verified basic forms and equivalent circuits of spiral inductors and various kinds of parasitics of equivalent circuits by using HFSS and Nexxim program that were 3-D EM analysis tools, and fabrication on-chip spiral inductors using Hynix's 0.25um 1-poly and 5-metal CMOS process. Comparing with PGS(patterned ground shield) and NPGS(non patterned ground shield) of spiral inductors of 3.5 turn, 4.5 turn and 5.5 turn, etc, the application of PGS could improve maximum Q value by 8-12%.

Keywords

References

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