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Design and Prototyping of a Novel Type Piezoelectric Micro-pump

  • Oh, Jin-Heon (School of Electrical and Computer Engineering, Chungbuk National University) ;
  • Lim, Jong-Nam (School of Electrical and Computer Engineering, Chungbuk National University) ;
  • Lee, Seung-Su (School of Electrical and Computer Engineering, Chungbuk National University) ;
  • Heo, Jun (School of Electrical and Computer Engineering, Chungbuk National University) ;
  • Lim, Kee-Joe (School of Electrical and Computer Engineering, Chungbuk National University)
  • Published : 2008.10.31

Abstract

Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring. The pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving parts. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump is about 580 ${\mu}l/min$ in flow rate with the highest pressure level of 0.85 kPa, when the driving voltage is 150 $V_p$, 57 kHz.

Keywords

References

  1. K. Uchino, 'Ferroelectric Devices', Marcel Dekker, New York, p. 197, 2000
  2. Peter Woias, 'Micrpumps-past, progress future prospects', Sensor and Actuators B, Vol. 105, p. 28, 2005 https://doi.org/10.1016/S0925-4005(04)00108-X
  3. J. C. Rife, M. I. Bell, J. S. Horwitz, M. N. Kabler, R. C. Y. Auyeung, and W. J. Kim, 'Miniature valveless ultrasonic pumps and mixers', Sensor and Actuators A, Vol. 86, p. 135, 2000 https://doi.org/10.1016/S0924-4247(00)00433-7
  4. M. M. Teymoori and E. Abbaspour-Sani, 'Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications', Sensor and Actuators A, Vol. 117, p. 222, 2005 https://doi.org/10.1016/j.sna.2004.06.025
  5. J. H. Paik, E. K. Lim, C. I. Kim, M. J. Lee, B. H. Choi, and S. K. Kim, 'Processing and properties of rainbow piezoelectric actuator', J. of KIEEME(in Korean), Vol. 19, No. 3, p. 222, 2006 https://doi.org/10.4313/JKEM.2006.19.3.222
  6. D. S. Lee, J. S. Ko, and Y. T. Kim, 'Bidrectional pumping properties of a peristaltic piezoelectric micropump with simple design and chemical resistance', Thin Solid Films, Vol. 468, p. 285, 2004 https://doi.org/10.1016/j.tsf.2004.05.014
  7. S. Ueha, Y. Tomikawa, M. Kurosawa, and N. Nakamura, 'Ultrasonic Motors-Theory and Applications', Oxford, Clarendon, p. 100, 1993
  8. S. Iwamatsu, S. Ueha, M. Kuribayashi, and E. Mori, 'Rotary ultrasonic motor using extensional vibration of a ring', Proc. of 6th SUE, p. 225, 1985
  9. Bar-Cohen and Z. Chang, 'Piezoelectrically actuated miniature peristaltic pump', Proc. SPIE's 7th AISSSM, p. 465, 2000
  10. K. Lim, S. Jeong, H. Yuk, and Z. Lee, 'Piezoelectric actuator using ultrasonic traveling wave of screw form', Proc. of 4th ICPADM, p. 224, 1994
  11. A. Love, 'A treatise on the mathematical theory of elasticity', Dover, New York, p. 451, 1944
  12. K. Lim, S. Lee, J. Lee, M. Lee, and S. Kang, 'Piezoelectric and dielectric characteristics of PZTPMNS ceramics', J. Electroceramics, Vol. 13, No. 3, p. 449, 2004 https://doi.org/10.1007/s10832-004-5140-9