Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
권호 표지
DOI QR코드

DOI QR Code

Characteristics of Indium Tin Oxide Films Grown on PET Substrate Grown by Using Roll-to-Roll (R2R) Sputtering System

롤투롤 스퍼터 시스템을 이용하여 PET 기판위에 성막 시킨 ITO 박막의 특성 연구

  • Cho, Sung-Woo (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Choi, Kwang-Hyuk (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Bae, Jung-Hyeok (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Moon, Jong-Min (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Jeong, Jin-A (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Jeong, Soon-Wook (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Park, No-Jin (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Kim, Han-Ki (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
  • 조성우 (금오공과대학교 정보나노소재공학과) ;
  • 최광혁 (금오공과대학교 정보나노소재공학과) ;
  • 배정혁 (금오공과대학교 정보나노소재공학과) ;
  • 문종민 (금오공과대학교 정보나노소재공학과) ;
  • 정진아 (금오공과대학교 정보나노소재공학과) ;
  • 정순욱 (금오공과대학교 정보나노소재공학과) ;
  • 박노진 (금오공과대학교 정보나노소재공학과) ;
  • 김한기 (금오공과대학교 정보나노소재공학과)
  • Published : 2008.01.31
Download PDF
⟨ Previous Next ⟩

Abstract

The electrical, optical, structural and surface properties of an indium tin oxide (ITO) film grown on a flexible PET substrate using a specially designed roll-to-roll (R2R) sputtering system as a function of the DC power, $Ar/O_2$ flow ratio, and rolling speed is reported. It was observed that both the electrical and optical properties of the ITO film on the PET substrate were critically dependent on the $Ar/O_2$ flow ratio. In addition, x-ray diffraction examination results showed that the structure of the ITO film on the PET substrate was an amorphous structure regardless of the DC power and the $Ar/O_2$ flow ratio due to a low substrate temperature, which was maintained constant by a main cooling drum. Under optimized conditions, ITO film with resistivity of $6.44{\times}10^{-4}{\Omega}-cm$ and transparency of 86% were obtained, even when prepared at room temperature. Furthermore, bending test results exhibited that R2R-grown ITO film had good flexibility which would be applicable to flexible displays and solar cells.

Keywords

References

  1. G. Franz and B. Sotier, J. Vac. Sci. Technol. A, 19, 2541 (2001).
  2. R. B. H. Tahar, T. Ban, Y. Ohya and Y. Takahashi, J. Appl.phys., 83, 5 (1998)
  3. H. Kim and C. M. Gilmore, J, Appl. Phys., 86, 11 (1999.)
  4. L.-J. Meng and M. P. dos Santos, Thin solid films, 322, 56-62 (1998) https://doi.org/10.1016/S0040-6090(97)00939-5
  5. J. Lewis, S. Grego, B. Chalamala, E. Vick and D. Temple, Appl. Phys. Lett., 85, 3450 (2004) https://doi.org/10.1063/1.1806559
  6. M. Izu and T. Ellison, Sol. Energy Mater. Sol. Cells, 78, 613 (2003) https://doi.org/10.1016/S0927-0248(02)00454-3
  7. J.-H. Hsieh and C. Li, J. Appl. Phys., 42, 5295 (2003) https://doi.org/10.1143/JJAP.42.5295
  8. R. B. H. Tahar, T. Ban, Y. Ohya and Y. Takahashi, J. Appl.Phys., 83, 2631 (1998) https://doi.org/10.1063/1.367025
  9. H.-C. Pan, M.-H. Shiao, C.-Y. Su and C.-N. Hsiao, J. Vac.Sci. Technol., A23, 1187 (2005) https://doi.org/10.1116/1.1924473
  10. S. Ishibashi, Y. Higuchi, Y. Ota and K. Nakamura, J. Vac.Sci. Technol., A8, 1399 (1990) https://doi.org/10.1116/1.576889
  11. K. S. Ong, J. Hu, R. Shrestha, F. Ehu and S. J. chua, Thin solid films, 477, 32 (2005) https://doi.org/10.1016/j.tsf.2004.08.107