A New Defect Inspection Method for TFT-LCD Panel using Pattern Comparison

패턴 비교를 통한 TFT-LCD 패널의 결함 검출 방법

  • 이경민 (포항공과대학 전자전기공학과) ;
  • 장문수 (포항공과대학 전자전기공학과) ;
  • 박부견 (포항공과대학 전자전기공학과)
  • Published : 2008.02.01

Abstract

In this paper, we propose a novel defects inspection algorithm for TFT-LCD panels. We first compensate the distorted image caused by the camera distortion and the uneven illumination environment using the least squares method and the bezier surface. We find a starting point of each pattern for restricting each pattern. A clean image is compared to each pattern to find defects using modified PCSR-G algorithm. The simulation example shows that our algorithm not only inspects the defects well, but also is robust to the 1-pixel error.

Keywords

References

  1. J. H. Kim, S. Ahn, J. W. Jeon, and J. E. Byun, "A High-speed Highresolution Vision System for the Inspection of TFT LCD", Proceedings, ISIE 2001, IEEE International Symposium, vol. 1, pp. 101-105, 2001
  2. K. Nakashima, "Hybrid Inspection System for LCD Color Filter Panels", 10th International Conference on Instrumentation and Measurement Technology, Hamamatsu, Japan, pp. 689-692, 1994
  3. C. L. Chang, H. H. Chang, C. P. Hsu, "An intelligent defect inspection technique for color filter", Proceedings of the 2005 IEEE InternationalConference on Mechatronics, Tiwan, 2005
  4. Y. Zhang, J. Zhang, "A fuzzy neural network approach for quantitative evaluation of mura in TFT-LCD", Neural Networks and Brain, 2005.ICNN&B '05, vol. 1, pp. 424-427, 2005
  5. K. B. Lee, M. S. Ko, J. J. Lee, T. M. Koo, K. H. Park, "Defect Detection Method for TFT-LCD Panel Based on Saliency Map Model", TENCON 2004. 2004 IEEE Region 10 Conference, vol. A, pp. 223-226, 2004
  6. C. M. Tseng, C. W. Tsai, C. S. Lin, Y. C. Lu, C. C. Hung, "Automatic Inspection of Etching Transistors in TFT-LCD Panel", Proceedings of the 2005 IEEE International Conference on Mechatronics, Taiwan, 2005
  7. K. M. Lee, M. S. Chang, P. G. Park, "Periodic Comparison Method for Defects Inspection of TFT-LCD Panel", ROCOM 2007, Hanzhou, 2007
  8. Pattern Defect Inspection Method by Parallel Grayscale Image Comparison without Precise Image Alignment", IECON 02, vol. 3, no. 5-8, pp. 2208-2213, 2002