참고문헌
- Sigmund, P., "Mechanisms and Theory of Physical Sputtering by Particle Impact," Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, Vol. 27, Issue 1-2, pp. 1-20, 1987 https://doi.org/10.1016/0168-583X(87)90004-8
- Boxleitner, W. and Hobler, G., "FIBSIM - dynamic Monte Carlo simulation of compositional and topography changes caused by focused ion beam milling," Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, Vol. 180, Issue 1-4, pp. 125-129, 2001 https://doi.org/10.1016/S0168-583X(01)00406-2
- Katardjiev, I. V., Carter, G., Nobes, M. J., Berg, S. and Blom, H. O., "3-Dimensional Simulation of Surface Evolution During Growth and Erosion," Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, Vol. 12, issue 1, pp. 61-68, 1994 https://doi.org/10.1116/1.578859
- Vasile, M. J., Niu, Z., Nassar, R., Zhang, W. and Liu, S., "Focused ion beam milling: Depth control for three-dimensional micro-fabrication," 41st International conference on electron, ion, and photon beam technology and nanofabrication, Dana Point, pp. 2350-2354, 1997
- Adams, D. P. and Vasile, M. J., "Accurate focused ion beam sculpting of silicon using a variable pixel dwell time approach," Journal of Vacuum Science & Technology B, Vol. 24, Issue 2, pp. 836-844, 2006 https://doi.org/10.1116/1.2184325
- Kim, H. B. and Hobler, G., "Ion Beam Induced Micro/Nano Fabrication: Modeling," Journal of the Korean Society for Precision Engineering, Vol. 24, No.8, pp108-115, 2007
- Yamamura, Y., Takiguchi, T. and Ishida, M., "Energy and Angular-Distributions of Sputtered Atoms at Normal Incidence," Radiation Effects and Defects in Solids, Vol. 118, Issue 3, pp. 237-261, 1991 https://doi.org/10.1080/10420159108221362
- Orloff, J., "Handbook of charged particle optics," CRC press, pp. 440-442, 1997