한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제25권3호
  • /
  • Pages.93-100
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  • 2008
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

모듈레이팅 레이저를 이용한 ESPI 시스템 개발

Development of ESPI System Using a Modulating LASER

  • 이근영 (전북대학교 대학원 기계설계학과) ;
  • 강영준 (전북대학교 기계항공시스템공학부) ;
  • 박낙규 (전북대학교 대학원 기계설계학과) ;
  • 이동환 (전북대학교 기계항공시스템공학부)
  • 발행 : 2008.03.01
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초록

Laser interferometry is widely used as a measuring system in many fields because of its high resolution and ability to measure a broad area in real-time all at once. In conventional LASER interferometry, for example Out-of-plane ESPI(Electronic Speckle Pattern Interferometry), In plane ESPI, Shearography and Holography, it uses PZT or other components as a phase shift instrumentation to extract 3D deformation data, vibration mode and others. However, in most cases PZT has some disadvantages, which include nonlinear errors and limited time of use. In the present study, a new type of LASER interferometry using a laser diode is proposed. Using LASER Diode Sinusoidal Phase Modulating (LD-SPM) interferometry, the phase modulation can be directly modulated by controlling the LASER Diode injection current thereby eliminating the need for PZT and its components. This makes the interferometry more compact. This paper reports on a new approach to the LD Modulating interferometry that involves four-buckets phase shift method. This study proposes a four-bucket phase mapping algorithm, which was developed to have a guaranteed application, to stabilize the system in the field and to be a user-friendly GUI. In this paper, the theory for LD wavelength modulation and sinusoidal phase modulation of LD modulating interferometry is shown. Four-bucket phase mapping algorithm is then introduced.

키워드

참고문헌

  1. Tatsuno, K. and Tshunoda, Y., "Diode laser direct modulation heterodyne interferometer," Applied Optics, Vol. 26, No. 1, pp. 37-40, 1987 https://doi.org/10.1364/AO.26.000037
  2. Sasaki, O., Ikeada, Y. and Suzuki, T., "Superluminescent diode interferometer using sinusoidal phase modulation for step-profile measurement," Applied Optics, Vol. 37, No. 22, pp. 5126-5131, 1998 https://doi.org/10.1364/AO.37.005126
  3. Sandoz, P., Gharbi, T. and Tribillon, G., "Phase-shifting methods for interferometers using laser-diode frequency-modulation," Optics Communi-cations, Vol. 132, No. 3, pp. 227-231, 1996 https://doi.org/10.1016/0030-4018(96)00369-0
  4. Zhao, X., Suzuki, T., Masutomi, T. and Sasaki, O., "Direct phase modulating laser diode interferometer for in-process measurement using sinusoidal signal synchronized with the CCD camera's exposure time," Proceedings of SPIE, Vol. 5633, pp. 272-279, 2005
  5. Zhao, X., Suzuki, T. and Sasaki, O., "Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method," Proceedings of SPIE, Vol. 4919, pp. 275-282, 2002
  6. Zhao, X., Suzuki, T. and Sasaki, O., "Photothermal Phase-Modulating Laser Diode Interferometer with High-Speed Feedback Control," Optical Review, Vol. 9, No. 1, pp. 211-214, 2002
  7. Wang, X., Qian, F., Chen, G. and Fang, Z., "Photothermal modulation of laser diode wavelength: application to sinusoidal phase-modulating interferometer for displacement measurements," Optics & Laser Technology, Vol. 31, No. 8, pp. 559-564, 1999 https://doi.org/10.1016/S0030-3992(99)00114-0
  8. Suzuki, T., Maki, T., Zhao, X. and Sasaki, O., "Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer," Applied Optics, Vol. 41, No. 10, pp. 1945-1953, 2002
  9. Kang, S. C., Jin, S. K. and Chee, C. K., "A Study on real time measuring microscopic movements in sinusoidal phase modulating interfrometry using a laser diode," The Korean Institute of Illuminating and Electrical Installation Engineers autumn conference, pp. 23-27, 1990
  10. Suzuki, T., Suda, H. and Sasaki, O., "Double sinusoidal phase-modulating distributed-Bragg-reflector laser-diode interferometer for distance measurement," Applied Optics, Vol. 42, No. 1, pp. 60-66, 2003 https://doi.org/10.1364/AO.42.000060
  11. Suzuki, T., Matsuda, M., Sasaki, O. and Maruyama, T., "Laser-diode interferometer with a photothermal modulation," Applied Optics, Vol. 38, No. 34, pp. 7069-7075, 1999
  12. Zhao, X., Suzuki, T. and Sasaki, O., "Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source," Proceedings of SPIE, Vol. 5265, pp. 127-133, 2004
  13. Chong, S. T. and Cho, S. H., "Nonlinear Resonance Characteristics of Transverse Type PZT ceramic resonator," Journal of the Korean Ceramic Society, Vol. 31, No. 10, pp. 1133-1140, 1994
  14. Lee, C. H., Yun, T. H. and Sin, S. Y., "Large-Signal Modulation Characteristics of a Diode Laser," Journal of the Institute of Electrinics Engineers of Korea, Vol. 23, No. 1, pp. 91-10, 1988
  15. Baek, T. H., Kim, M. S., Na, E. G. and Koh, S. K., "Application of ESPI to Measurement of Out-of-plane Displacement in a Spot Welded Canti-levered Plate," International Journal of Precision Engineering and Manufacturing, Vol. 4, No. 5 , pp. 41-46 , 2003
  16. Hong, K. H., Kang, Y. J. and Park, N. K., "Research about responsiveness vector by angles in Out-of-Plane ESPI," Korea Machine Learned Society Spring Conference, pp. 353-356, 2006
  17. Kim, S. J. Kang, Y. J. and Park, N. K., "A Study on the effect Phase-map by Sensitivity Vector in ESPI System," Proc. of KSPE Spring Conference, pp. 313-314, 2007
  18. Moon, S. J., Kang Y. J. and Baik S. H., "Analysis on the Error of Sensitivity Vector of Holographic Interferometer for Measuring Out-of-plane Displacement," Proc. of KSPE Spring Conference, pp. 515-520, 1995
  19. Baik, T. H., Kim, S. U. and Na, E. K., "Measurement of Out-of-plane Displacement in a Spot Welded Canti-levered Plate using Laser Speckle Interferometry with 4-step Phase Shifting Technique," Journal of the Korean Society for Precision Engineering, Vol. 19, No. 3, pp. 66-72, 2002