The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

The Power Rating Design of Inductively Coupled Plasma Light Source and The Electrical Dependency Between Parameters

ICP 광원의 정격용량 설계 요소와 전기적 의존성

  • 김현일 (동국대학 전기공학과) ;
  • 박대희 (원광대학 전기전자및정보공학부) ;
  • 장홍순 (한국산업기술대학 지식기반기술.에너지대학원) ;
  • 백수현 (동국대학 전기공학과) ;
  • 임연찬 (원광대학 전자재료공학과)
  • Published : 2008.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

We studied on the dependency of parameters which those were used to design a ballast of ICP light source. These parameters were derived from Barkhausen criterion equation about the oscillating condition of ballast. Comparing with a change of turns, we can suggest that a change of l is suitable to control a $I_p$ of an ICP light source. According to the Z-l equation, we can find an optimum rating power of ICP light sources corresponding to l.

Keywords

References

  1. Miroslav sedlacek, "Electron Physics of Vacuum and Gaseous Devices", JOHN WILEY & SONS, INC., pp386-408, 1996.
  2. Brian Chapman, "Glow Discharge Processessputtering and plasma etching," JOHN WILEY & SONS, INC., pp.65-72, 1980.
  3. R. O. Dendy, "Plasma Dynamics," CLARENDON PRESS . OXFORD, pp 8-18, 1990.
  4. J. R. Coaton and A. M. Marsden, "Lamps and Lighting", Fourth Edition, ANRNOLD, pp 1-336, 1997.
  5. E. Robert, H. Sarroukh, C. Cachoncinlle, R. Viladrosa, V. Hochet, S. Eddaoui and J. M. Pouvesle, "Spectroscopic and electrical study of rare-gas-based, hollow cathode luminescent discharges: Application to the life time and efficiency enhancement of mercury- free signs", Pure and applied chemistry. : Chimie pure et appliquee, Vol. 77, No. 2, pp. 463-474, 2005 https://doi.org/10.1351/pac200577020463
  6. J. Kawanaka, A. Ogata, S. Kubodera, W. Sasaki, K. Kurosawa, "Improved output characteristics of a vacuum ultraviolet xenon gas jet discharge lamp with a magnetic field", Applied physics. B, Lasers and optics, Vol. 65, No. 4, pp. 609-612, 1997 https://doi.org/10.1007/s003400050321
  7. H. Motomura, M. Jinno and M. Aono, "Measurement of metastable xenon density in mercury-free fluorescent lamps by IR laser absorption spectroscopy", 2002 Joint Conference of ACED & K-J Symposium on ED and HVE, Vol. 1, pp 67-70, Nov. 2002
  8. Zhi Li, philip K. T. Mok, Wing-Hung Ki and Johnny K. O. Sin, "A simple method to design resonant circuits of electronic ballast for fluorescent lamps", IEEE International Symposium on Circuits and System, pp 1744-1747, 1997.
  9. Alysson Raniere Seidel, Fabio Ecke Bisogno, Humberto Pinheiro and Ricardo Nederson do Prado, "Self-Oscillating Dimmable Electronic Ballast", IEEE Trans. Ind. Elec., Vol. 50, pp 1267-1274, 2003. https://doi.org/10.1109/TIE.2003.819696
  10. Ricardo N. do Prado, Saul A. Bonaldo Diego S. Greff, and Fábio E. Bisogno, "A Unity Power Factor Electronic Ballast for Fluorescent Lighting", IEEE Industry Application Society, Annual Meeting, pp 2366-2371, October 1997.