Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Effects of SiO2 on the High Temperature Resistivities of AIN Ceramics

SiO2 첨가가 AIN 세라믹스의 고온 비저항에 미치는 영향

  • 이원진 ((주)코미코) ;
  • 김형태 (요업(세라믹)기술원 이천분원 구조세라믹부) ;
  • 이성민 (요업(세라믹)기술원 이천분원 구조세라믹부)
  • Published : 2008.01.31
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Abstract

The effects of $SiO_2$ impurity on the high temperature resistivities of AIN ceramics have been investigated. When $SiO_2$ was added into 1 wt% $Y_2O_3$-doped AIN, DC resistivities have decreased and electrode polarizations disappeared. Impedance spectroscopy showed two semi-circles at $600^{\circ}C$, which were attributed to grain and grain boundary, respectively. $SiO_2$ doping had more significant effects on the grain resistivity than grain boundary resistivity, implying that doped Si acted as a donor in AIN lattice. In addition, voltage dependency of DC resistivity was observed, which might be related to dependency of size of grain boundary semi-circle on the bias voltage in impedance spectroscopy.

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References

  1. R. Atkinson, "A Simple Theory of the Johnsen-Rahbek Effect," Brit. J. Appl. Phys., 2 [2] 325-32 (1969) https://doi.org/10.1088/0022-3727/2/3/303
  2. T. Watnabe, T. Kitabayashi, and C. Nakayama, "Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck," Jpn. J. Appl. Phys., 31 2145-50 (1992) https://doi.org/10.1143/JJAP.31.2145
  3. T. Watnabe, T. Kitabayashi, and C. Nakayama, "Relationship between Electrical Resistivity and Electrostatic Force of Alumina Electrostatic Chuck," Jpn. J. Appl. Phys., 32 864-71 (1993) https://doi.org/10.1143/JJAP.32.864
  4. J. van Elp, P.T.M. Giesen, and A.M.M. de Groof, "Lowthermal Expansion Electrostatic Chuck Materials and Clamp Mechanisms in Vacuum and Air," Microelectronic Eng., 73-74 941-47 (2004) https://doi.org/10.1016/S0167-9317(04)00248-5
  5. G. Kalkowski, S. Risse, G. Harnisch, and V. Guyenot, "Electrostatic Chucks for Lithography Applications," Microelectronic Eng., 57-58 219-22 (2001) https://doi.org/10.1016/S0167-9317(01)00519-6
  6. J. C. Bang, "Fabrication of Borosilicate Glass-Coated Electrostatic Chucks(in Kor.)," J. Microelectronics & Packaging Soc., 9 [1] 49-52 (2002)
  7. G. Kalkowski, S. Risse, and V. Guyenot, "Electrostatic Chuck Behavior at Ambient Conditions," Microelectronic Eng., 61-62 357-61 (2002) https://doi.org/10.1016/S0167-9317(02)00501-4
  8. G. Kalkowski, S. Risse, S. Mller, and G. Harnisch, "Electrostatic Chucks for EUV Masks," Microelectronic Eng., 83 714-17 (2006) https://doi.org/10.1016/j.mee.2006.01.049
  9. C. M. Whang, W. J. Jeong, and S. W. Choi, "Synthesis of Aluminum Nitride Powder from Aluminum Hydroxide by Carbothermal Reduction-Nitridation(in Kor)," J. Kor. Ceram. Soc., 31 [8] 893-901 (1994)
  10. S. K. Yang and J. B. Kang, "Synthesis of Aluminum Nitride Whisker by Carbothermal Reaction I. Effect of Fluoride Addition(in Kor)," J. Kor. Ceram. Soc., 41 [2] 118-24 (2004) https://doi.org/10.4191/KCERS.2004.41.2.118
  11. G. A. Slack, "Nonmetallic Crystals with High Thermal Conductivity," J. Phy. Chem. Solids, 34 321-35 (1973) https://doi.org/10.1016/0022-3697(73)90092-9
  12. S. A. Jang and G. M. Choi, "Electrical Conduction in Aluminum Nitride," J. Am. Ceram. Soc., 76 [4] 957-60 (1993) https://doi.org/10.1111/j.1151-2916.1993.tb05319.x
  13. W.-J. Lee, S.-M. Lee, K.-B. Shim, and H.-T. Kim, "Effects of Sintering Conditions on the Electrical Conductivity of 1 wt% Y_2O_3-doped$ AlN Ceramics(in Kor)," J. Kor. Ceram. Soc., 44 [2] 116-23 (2007) https://doi.org/10.4191/KCERS.2007.44.2.116
  14. D. R. Clarke, "Varistor Ceramics," J. Am.Ceram. Soc., 82 [3] 485-502 (1999) https://doi.org/10.1111/j.1151-2916.1999.tb01793.x
  15. S. Rodewald, J. Fleig, and J. Maier, "The Distribution of Grain Boundary Resistivities in SrTiO_3$ Polycrystals: a Comparison between Spatially Resolved and Macroscopic Measurements," J. Eur. Ceram. Soc., 21 [10-11] 1749-52 (2001) https://doi.org/10.1016/S0955-2219(01)00108-X

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