Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Fabrication and Evaluation of Tantalum Compacts for Sputtering Target Application

스퍼터링 타겟재의 응용을 목적으로 하는 탄탈륨 소결체의 제작 및 평가

  • Chang, Se-Hun (Korea Institute of Industrial Technology(KITECH), Gwangju Research Center) ;
  • Choi, Jung-Chul (Korea Institute of Industrial Technology(KITECH), Gwangju Research Center) ;
  • Choi, Se-Weon (Korea Institute of Industrial Technology(KITECH), Gwangju Research Center) ;
  • Oh, Ik-Hyun (Korea Institute of Industrial Technology(KITECH), Gwangju Research Center)
  • 장세훈 (한국생산기술연구원 광주연구센터) ;
  • 최정철 (한국생산기술연구원 광주연구센터) ;
  • 최세원 (한국생산기술연구원 광주연구센터) ;
  • 오익현 (한국생산기술연구원 광주연구센터)
  • Published : 2008.04.30
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Abstract

In this study, tantalum (Ta) compacts were fabricated in a spark plasma sintering (SPS) process and their microstructure and mechanical properties were investigated. Ta compacts with a density of 99% were successfully fabricated by controlling the sintering conditions of the current and the temperature. The density and hardness were increased as the sintering temperature increased. The $Ta_2C$ compound was observed at the surface of the compacts due to the contact between the Ta powder and graphite mold during the sintering process. The main fracture mode showed a mixed type with intergranular and transgranular modes having some roughness.

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References

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