Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Gas Sensing Characteristics of WO3-Doped SnO2 Thin Films Prepared by Solution Deposition Method

용액적하법으로 제조된 WO3 첨가 SnO2 박막의 가스감응 특성

  • 최중기 (고려대학교 신소재공학부) ;
  • 조평석 (고려대학교 신소재공학부) ;
  • 이종흔 (고려대학교 신소재공학부)
  • Published : 2008.04.30
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Abstract

$WO_3$-doped $SnO_2$ thin films were prepared in a solution-deposition method and their gas-sensing characteristics were investigated. The doping of $WO_3$ to $SnO_2$ increased the response ($R_a/R_g,\;R_a$: resistance in air, $R_g$: resistance in gas) to $H_2$ substantially. Moreover, the $R_a/R_g$ value of 10 ppm CO increased to 5.65, whereas that of $NO_2$ did not change by a significant amount. The enhanced response to $H_2$ and the selective detection of CO in the presence of $NO_2$ were explained in relation to the change in the surface reaction by the addition of $WO_3$. The $WO_3$-doped $SnO_2$ sensor can be used with the application of a $H_2$ sensor for vehicles that utilize fuel cells and as an air quality sensor to detect CO-containing exhaust gases emitted from gasoline engines.

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