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Femto-Second Laser Glass Cutting for Flat Panel Display

펨토초 레이저를 이용한 평판 디스플레이 유리기판 절단 연구

  • Kim, Kwang-Ryul (Department of Electronics & Computer Engineering, Hanyang University)
  • 김광열 (한양대학교, 전자통신 컴퓨터공학부)
  • Published : 2008.05.27

Abstract

A laser glass cutting system using a femto-second laser was evaluated for Flat Panel Display (FPD) glass. A theoretical analysis of the ablation threshold and depth is described using an explicit analytic form. Experiments for clean and deep grooves were performed using a 3W femto-second laser, and the relationships between the input energy and the scribing depth as well as the threshold energy are presented. Mechanical breaking after the scribing process was carried out and the results are compared with a theoretical method. It was found that a two-sided LCD panel glass can be cut clearly using the laser cutting method. The methodology was found to be very effective as a mass-production cutting system.

Keywords

References

  1. E. G. Gamaly, A.V. Rode, and B. L. Davies, Phys. Plasmas, 9, 949 (2002) https://doi.org/10.1063/1.1447555
  2. K. R. Kim, Kor. J. Mater. Res., 17(7), 352 (2007)
  3. J. Hassaun, Laser Focus World, 35, 86 (1999)
  4. H. Y. Zheng and T. Lee, J. Micromech. Microeng., 15, 2093 (2005) https://doi.org/10.1088/0960-1317/15/11/014
  5. C. -H. Tsai and H. -W. Chen, Int. J. Adv. Manuf. Technol., 23, 342 (2004) https://doi.org/10.1007/s00170-003-1679-x
  6. V. I. Kondrashov, L. A. Shitova, V. A. Litvinov and V. V. Surkov, Glass and Ceramics, 58, 9 (2001)
  7. J. Cheng, M. Yen, C. Wei, Y. Chuang and T. Young, J. Micromech. Microeng., 15, 1147 (2005) https://doi.org/10.1088/0960-1317/15/6/005
  8. M. D. Perry, B. C. Stuart,, P. S. Banks, M. D. Feit, V. Yanovsky and A. M. Rubenchik, J. Appl. Phys., 85, 6803 (1999) https://doi.org/10.1063/1.370197
  9. K. S. -Tinten, J. Bialkowski, A. CAvalieri, M. Boing, H. Schuler and D. V. Linde, Proc. SPIE 3343, 47 (1998)