Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Throughput Analysis of the Twin Chamber Platform Equipment according to the Load-lock Configuration

쌍 체임버 기반 장비의 로드락 구성에 따른 생산성 분석

  • Hong, Joo-Pyo (Department of Industrial Design Engineering, Korea University of Technology and Education) ;
  • Lee, Ki-Seok (Department of Mechanical and Automotive Engineering, Kongju National University)
  • 홍주표 (한국기술교육대학교 디자인공학과) ;
  • 이기석 (공주대학교 기계자동차공학부)
  • Published : 2008.06.30
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Abstract

Productivity is one of the performance indices of the semiconductor equipment in manufacturing viewpoint. Among many ways tried and adopted for improvement of the productivity of the FAB equipment, variation of equipment configuration was considered and its effect on the throughput was analyzed. Parallel machine cycle charts that were generated based on the equipment log were used in the analysis. Efficiency of the equipment due to change of the structure and the probability of the usage in the manufacturing process were examined. The results showed that the modification of the control algorithm in the equipment and the redistribution of the process time for each process and transfer module along to the change in the structure enhance the throughput of the equipment.

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