Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Dynamic Modeling and Input Shaping Control of a Positioning Stage

위치결정 스테이지에 대한 동적 모델링과 입력성형 제어

  • Published : 2008.04.15
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Abstract

This paper presents the dynamic analysis and input shaping control of a positioning stage. Vibration characteristics of the positioning stage are affected not only by the structural dynamics but also by the servo actuators that consist of the mechanism; driving motor and controller. This paper proposes an integrated dynamic model to accommodate both the structural dynamics and the servo actuators. Theoretical modal analysis with a commercial finite element code is carried out to investigate the dynamic characteristics of the experimental positioning stage. Experiments are performed to validate the theoretical modal analysis and estimate the equivalent stiffness due to the servo actuators. This paper deals with an input shaping scheme to suppress vibration of the positioning stage. Input shapers are systematically implemented for the positioning stage in consideration of its dynamics. The effects of servo control gain are also investigated. The experiments show that input shaping effectively removes residual vibrations and then improves the performance of positioning stage.

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References

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