Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Polymer Waveguide Based Refractive Index Sensor Using Polarimetric Interference

편광 간섭을 이용한 광도파로 기반의 표면 굴절률 센서

  • Son, Geun-Sik (Department of Electronic Engineering, Kwangwoon University) ;
  • Kwon, Soon-Woo (School of Advanced Materials science & Engineering, Sungkyunkwan University) ;
  • Kim, Woo-Kyung (Nano Bio Research center, Korea Electronics Technology Institute) ;
  • Yang, Woo-Seok (Nano Bio Research center, Korea Electronics Technology Institute) ;
  • Lee, Hyung-Man (Nano Bio Research center, Korea Electronics Technology Institute) ;
  • Lee, Han-Young (Nano Bio Research center, Korea Electronics Technology Institute) ;
  • Lee, Sung-Dong (Infopia) ;
  • Lee, Sang-Shin (Department of Electronic Engineering, Kwangwoon University)
  • 손근식 (광운대학교 전자공학과) ;
  • 권순우 (성균관대학교 신소재공학과) ;
  • 김우경 (전자부품연구원 바이오 의료기기연구센터) ;
  • 양우석 (전자부품연구원 바이오 의료기기연구센터) ;
  • 이형만 (전자부품연구원 바이오 의료기기연구센터) ;
  • 이한영 (전자부품연구원 바이오 의료기기연구센터) ;
  • 이성동 (인포피아) ;
  • 이상신 (광운대학교 전자공학과)
  • Published : 2008.06.30
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Abstract

A novel refractive index sensor, which consists of polymer channel waveguide overlaid with $TiO_2$ thin film, is demonstrated. To evaluate the fabricated sensor, we measured the polarimetric interference induced by concentration change of injected glycerol solution. Our experimental results show that thicker $TiO_2$ film improves the sensitivity of the polarimetric interferometer. For the fabricated waveguide with a 20 nm thick $TiO_2$ film, the measured index change to lead phase variation of $2{\pi}$ is $1.8{\times}10^{-3}$.

본 논문에서는 폴리머 광도파로 상부에 $TiO_2$(Titanium dioxide)박막이 증착된 굴절률 센서를 구현하였다. 제작된 센서를 이용하여 글리세롤의 굴절률 변화에 따른 출력광의 편광 간섭 변화를 측정하였다. 또한 박막 두께에 따른 편광 간섭의 민감도 변화를 확인하고, 수치해석 결과와 비교하였다. 특히 $TiO_2$가 20 nm 증착된 광도파로에서 $2{\pi}$의 위상차를 갖는 굴절률 변화는 $1.8{\times}10^{-3}$이다.

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