Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on the Surface Characteristics of MgO Layer as the Various Deposition Methods of Electron-beam Evaporation

Electron-beam Evaporation의 증착 방법에 따른 MgO Layer의 표면 특성에 관한 연구

  • 허정은 (부산대학교 전자전기통신공학부) ;
  • 이돈규 (동의대학교 교양교육원) ;
  • 조성용 (부산대학교 전자전기통신공학부) ;
  • 이해준 (부산대학교 전자전기통신공학부) ;
  • 이호준 (부산대학교 전자전기통신공학부) ;
  • 박정후 (부산대학교 전자전기통신공학부)
  • Published : 2008.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

A MgO layer is used as electrode protective film in the alternating current plasma display panel (AC PDP). The properties of MgO layer are thought to be one of the most important factors that affects the panel reliability through the firing voltage variation. In this study, we investigated the relations between the surface characteristics and e-beam evaporation process parameters such as deposition rate, temperature of substrate and distance between the MgO pellet and substrate. To produce the MgO layer of (200) crystal orientation, we suggest the high temperature of the substrate, the long distance between the pellet and substrate and the high deposition rate.

Keywords

References

  1. J. P. Beouf, 'Plasma display panels : Physics, recent developments and key issues', J. Phys. D：Appl. Phys., Vol. 36, No. 6, p. R53, 2003
  2. H. Uchike and T. Hirakawa, 'Color plasma displays', Proceedings of the IEEE, Vol. 90, No. 4, p. 533, 2002 https://doi.org/10.1109/JPROC.2002.1002525
  3. D.-K. Lee, C.-H. Park, H. J. Lee, W.-S. Choi, D.-H. Kim, and H.-J. Lee, 'Electro- optical characteristics of plasma display panel with $Mg_{1−x}Si_xO$ protecting thin films deposited by an electron-beam evaporation method', Appl. Phys. Lett., Vol. 89, No. 19, p. 191501, 2006 https://doi.org/10.1063/1.2372743
  4. D.-K. Lee, C.-H. Park, H. J. Lee, J.-Y. Choi, D.-H. Kim, and H.-J. Lee, 'The effect of Si-doped protective layer on the discharge characteristics of an ac plasma display panel', Phys. Plasmas, Vol. 14, No. 10, p. 103505, 2007 https://doi.org/10.1063/1.2796104
  5. C.-H. Park, J.-Y. Choi, M.-S. Choi, Y.-K. Kim, and H.-J. Lee, 'Effects of MgO thin film thickness and deposition rate on the lifetime of as plasma display panel', Surface & Coatings Technology, Vol. 197, p. 223, 2005 https://doi.org/10.1016/j.surfcoat.2004.11.039
  6. J. S. Park, 'Comparison study between modeling and experiment of the breakdown voltage for AC plasma display panel', J. of KIEEME(in Korean), Vol. 13, No. 12, p. 1039, 2000
  7. E. H. Choi, 'Discharge and characteristics of ion induced MgO protective layer in PDP', Information Display, Vol. 5, No. 6, p. 23, 2004
  8. J.-H. Ryu, 'A study on the improvement of the high temperature misfiring', thesis for a doctor's degree, Pusan National University, 2005
  9. S. K. Lee, K. W. Whang, J. H. Kim, and J. H. Lee, 'Secondary electron on emission from MgO thin films for low-energy noble gases by pulsed ion beam technique', SID 02 DIEST, p. 424, 2002
  10. D. H. Nam, K. W. Lee, and J. W. Park, 'DC magnetron sputtering of Cr/Cu/Cr metal electrodes for AC plasma display panel',J. of KIEEME(in Korean), Vol. 13, No. 8, p. 704, 2000
  11. J. H. Shin and C. H. Park, 'The effect of dielectric thickness and barrier rib height on addressing time of coplanar AC PDP', J. of KIEEME(in Korean), Vol. 15, No. 12, p. 1065, 2002