Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Growth of AlN crystals by the sublimation process

승화법에 의한 AlN 결정의 성장

  • Kang, Seung-Min (Department of Advanced Materials Science and Engineering, Hanseo University)
  • Published : 2008.04.30
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Abstract

AlN crystals were grown by the sublimation process. As grown AlN crystals were the polycrystalline boule in the form of the agglomerate of small AlN single crystalline AlN. As-grown AlN boule has a length about 2${\sim}$3 mm long and a diameter of 1 inch. The carbon impurities were observed on the surface and inside of the grown AlN crystals and the growth behavior was investigated by optical microscopy and SEM observation.

승화법에 의하여 AlN 결정을 성장하였다. 성장된 결정의 상은 미세한 단결정상이 응집된 다결정상이었으며, 약 2${\sim}$3mm의 길이와 직경 1인치의 크기로 증착되어진 성상을 얻었다. 성장된 결정의 표면에 탄소의 흡착이 관찰되었으며, 광학현미경과 SEM을 통하여 AlN 결정의 성장 거동에 대하여 고찰하여 보았다.

Keywords

References

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