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Enhanced Cathode-Luminescence in a InxGa1-xN/InyGa1-y Green Light Emitting Diode Structure Using Two-Dimensional Photonic Crystals

  • Choi, Eui-Sub (Dept. of Electrical and Electronic Engineering, Ajou University) ;
  • Lee, Jae-Jin (Dept. of Electrical and Electronic Engineering, Ajou University)
  • Published : 2008.06.30

Abstract

We report on the enhancement of cathode-luminescence in an $In_xGa_{1-x}N/In_yGa_{1-y}$ green light emitting diode structure using two-dimensional photonic crystals. The square lattice arrays of photonic crystals with diameter/periodicity of 200/500 nm were fabricated by electron beam lithography. Inductively coupled plasma dry etching was used to etch and define photonic crystals. Three samples with different etch depths, i.e., 170, 95, and 65 nm, were constructed. Field emission scanning electron microscope analysis shows that air holes of photonic crystal structure with inverted-cone shapes were fabricated after dry etching. Cathode-luminescence measurement indicated that up to 30-fold enhancement of cathode-luminescence intensity has been achieved.

Keywords

References

  1. M. Boroditsky and E. Yablonovitch, Proc. SPIE 3002, 119, 1997
  2. T. N. Oder, J. Shakya, J. Y. Lin, and H. X. Jiang, "III- nitride photonic crystals," Appl. Phys. Lett, vol. 83, 1231, 2003 https://doi.org/10.1063/1.1600839
  3. L. Chen and A. V. Nurmiko, "Fabrication and performance of efficient blue light emitting III-nitride photonic crystals," Appl. Phys. Lett, vol. 85, 3663, 2004 https://doi.org/10.1063/1.1808881
  4. C.-F. Chu, F.-I Lai, J.-T. Chu, C.-C. Yu, C.-F. Liu, H.-C. Luo, and S. C. Wang, "Study of GaN light-emitting diodes fabricated by laser lift-off technique," J. Appl. Phys, vol. 95, 3916, 2004 https://doi.org/10.1063/1.1651338
  5. F. A. Kish, F. M. Steranka, D. C. DeFevere, D. A. Vanderwater, K. G. Park, C. P. Kuo, T. D. Osentowski, M. J. Peanasky, J. G. Yu, R. M. Fletcher, D. A. Steigerwald, and M. G. Craford, "Very high-efficiency semiconductor wafer-bonded transparent-substrate $(Al_XGa_{1-X})_{0.5}In0.5P/GaP$ light-emitting diodes," Appl. Phys. Lett, vol. 64, 2839, 1994 https://doi.org/10.1063/1.111442
  6. M. R. Krames, M. Ochiai-Holcomb, G. E. Hofler, C. Carter-Coman, E. I. Chen, I.-H. Tan, P. Grillot, N. F. Gardner, H. C. Chui, J.-W. Huang, S. A. Stockman, F. A. Kish, and M. G. Craford, "High-power truncatedinverted- pyramid $(Al_XGa_{1-X})_{0.5}In0.5P/GaP$ light-emitting diodes exhibiting >50% external quantum efficiency," Appl. Phys Lett, vol. 75, 2365, 1999 https://doi.org/10.1063/1.125016
  7. J. Shakya, J. Y. Lin, and H. X. Jiang, "Time-resolved electroluminescence studies of III-nitride ultraviolet photonic-crystal light-emitting diodes," Appl. Phys Lett, vol. 85, 2104, 2004 https://doi.org/10.1063/1.1786372
  8. A. Erchak, D. J. Ripin, S. Fan, P. Rakich, K. D. Joannopoulos, E. P. Ippen, G. S. Petrich, and L. A. Kolodziejski, "Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode," Appl. Phys. Lett, vol. 78, 563, 2001 https://doi.org/10.1063/1.1342048
  9. K. Kim, J. Choi, S. C. Jeon, J. S. Kim, and H. M. Lee, "Photonic crystal effect on light emission from InGaN/GaN multi-quantum-well structures," Appl. Phys. Lett, vol. 90, 181115, 2007 https://doi.org/10.1063/1.2735927

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