전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제57권7호
  • /
  • Pages.1218-1222
  • /
  • 2008
  • /
  • 1975-8359(pISSN)
  • /
  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

대기압 플라즈마 발생시 인가전압의 상승시간에 따른 영향

Effect of Rise Time of a Pulse Bias Voltage on Atmospheric Plasma Generation

  • 김재혁 (홍익대 대학원 전기정보제어공학부) ;
  • 진상일 (홍익대 대학원 전기정보제어공학부) ;
  • 김영민 (홍익대 공대 전자전기공학부)
  • 발행 : 2008.07.01
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초록

We investigate the effect of rise time of a pulse bias voltage on atmospheric plasma generation. With the faster rise time of the pulse bias, the glow discharge appears to be more uniformly generated along the electrodes. I-V measurement confirms that higher loading power can be obtained using the faster rise time. A new understanding for atmospheric plasma generation at a micro-gap electrode is suggested.

키워드

참고문헌

  1. S.-J. Park, J. Chen, C. Liu, and J. G. Eden, Appl. Phys. Lett. 78, 4 2001 https://doi.org/10.1063/1.1336815
  2. T. Yokoyama, S. Hamada, S. Ibuka, K. Yasuoka, and S. Ishii, J. Phys. D, 38, 1684, 2005 https://doi.org/10.1088/0022-3727/38/11/007
  3. H. Park, T. Lee, K. Park, H. Baik, S. Lee, and K. Song, Appl. Phys. Lett., 82, 19, 2003 https://doi.org/10.1063/1.1535264
  4. S,H.Han and Y.M.Kim, Journal of Vacuum Science and Technology, vol.25, pp.286-288, Jan/Feb 2007 https://doi.org/10.1116/1.2433968
  5. S.L.Yao, E.Suzuki, N.Meng and A.Nakayama, energy & Fuels, vol. 15, pp.1300-1303, 2001 https://doi.org/10.1021/ef0100909
  6. Jeffrey l. Levatter and Shao-Chi Lin, J. Appl. Phys. Vol. 51, Jan 1980
  7. Nils Brenning, Ingvar Axnas, J. Olof Nilsson, and Jan E. Eninger, IEEE Transaction On Plasma Science, vol. 25, NO. 1, Feb 1997
  8. M. Surendra, D.B Graves, and G.M.Jellum, Physical Review A, vol. 41, Number2, 15 Jan 1990 https://doi.org/10.1103/PhysRevA.41.1990
  9. A. Bogaerts, R. Gijbels, J. Appl. Phys. 78(4), 15 August 1995