Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Calculation of Effective Material Property for Multi-Grain Orthotropic Material by BEM

경계요소법에 의한 다결정 직교 이방성 재료의 유효 재료 상수의 계산

  • 김동은 (경상대학교 대학원 기계공학과) ;
  • 이상훈 (경상대학교 대학원 기계공학과) ;
  • 정일중 (경상대학교 대학원 기계공학과) ;
  • 이석순 (경상대학교 기계항공공학부)
  • Published : 2008.09.01
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Abstract

Most of the MEMS parts are made of multi-grain silicon wafer, which is the orthotropic material and its material direction is arbitrary. The reliability of the parts must be guaranteed in order to use for the commercial usage. The need of the structural analysis of its parts emerges an important factor. The material properties of the MEMS parts are calculated by the numerical method in order to reduce a material test. In this study, the effective elastic modulus and its Poisson's ratio are calculated by the boundary element method(BEM) and are compared with the results by the finite element method(FEM).

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References

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