Synthesis of PZT thin films made by PZ/PT multi-layered structure

PZ/PT 다층막에 의한 PZT 박막의 제작

  • Kim, S.D. (Department of Electrical and Electronics Engineering, TongMyong University) ;
  • Jeon, K.B. (Department of Physics, Dong-A University) ;
  • Bae, S.H. (Department of Physics, Dong-A University) ;
  • Jin, B.M. (Department of Physics, Dong-Eui University)
  • Published : 2008.06.30

Abstract

Four different thin films were made by depositing PZ and PT in different stacking sequences. PZ and PT phases are preferably co-existed in sample A and C that are annealing after each coatings. The sample B and D, on the other hands, have tendency toward the PZT phase after co-firing the sample. The sample B that started from PT stacking first was more stable PZT phase than that of PZ first sample D.

PZ와 PT를 각각 3층씩 그 순서를 달리하고 열처리 과정을 달리하여 4가지 시료를 만들었다. PZ와 PT를 독립적으로 열처리 한 시료들에서는 PZ와 PT가 독립적으로 존재하는 경향이 강한 반면 PZ와 PT를 동시에 열처리 한 시료들은 PZT 복합상이 존재하는 확률이 더 높아졌다. 후자의 경우 PT를 먼저 증착한 쪽이 더 안정적인 PZT 상을 만든다는 결론을 지을 수 있었다.

Keywords

References

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