한국재료학회지 (Korean Journal of Materials Research)

  • 제18권10호
  • /
  • Pages.558-563
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  • 2008
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  • 1225-0562(pISSN)
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  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
권호 표지
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D.C magnetron sputter법으로 증착된 TiAlN의 중간층에 따른 특성연구

Characteristics of TiAlN Film on Different Buffer Layer by D.C Magnetron Sputter

  • 김명호 (전남대학교 공과대학 신소재공학부) ;
  • 이도재 (전남대학교 공과대학 신소재공학부) ;
  • 이광민 (전남대학교 공과대학 신소재공학부) ;
  • 김운섭 (전남대학교 공과대학 신소재공학부) ;
  • 김민기 (선경중공업(주)) ;
  • 박범수 ((주)에이지광학) ;
  • 양국현 ((주)에이지광학)
  • Kim, Myoung-Ho (Department of Material Science & Engineering, Chonnam National University) ;
  • Lee, Doh-Jae (Department of Material Science & Engineering, Chonnam National University) ;
  • Lee, Kwang-Min (Department of Material Science & Engineering, Chonnam National University) ;
  • Kim, Woon-Sub (Department of Material Science & Engineering, Chonnam National University) ;
  • Kim, Min-Ki (Sunkyung Heavy Industrial CO.) ;
  • Park, Burm-Su (A. G. Optics Co.) ;
  • Yang, Kook-Hyun (A. G. Optics Co.)
  • 발행 : 2008.10.27
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초록

TiAlN films were deposited on WC-5Co substrates with different buffer layers by D.C. magnetron sputtering. The films were evaluated by microstructural observations and measuring of preferred orientation, hardness value, and adhesion force. As a process variable, various buffer layers were used such as TiAlN single layer, TiAlN/TiAl, TiAlN/TiN and TiAlN/CrN. TiAlN coating layer showed columnar structures which grew up at a right angle to the substrates. The thickness of the TiAlN coating layer was about $1.8{\mu}m$, which was formed for 200 minutes at $300^{\circ}$. XRD analysis showed that the preferred orientation of TiAlN layer with TiN buffer layer was (111) and (200), and the specimens of TiAlN/TiAl, TiAlN/CrN, TiAlN single layer have preferred orientation of (111), respectively. TiAlN single layer and TiAlN/TiAl showed good adhesion properties, showing an over 80N adhesion force, while TiAlN/TiN film showed approximately 13N and the TiAlN/CrN was the worst case, in which the layer was destroyed because of high internal residual stress. The value of micro vickers hardness of the TiAlN single layer, TiAlN/TiAl and TiAlN/TiN layers were 2711, 2548 and 2461 Hv, respectively.

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참고문헌

  1. S. Y. Yoon, J. K. Kim and K. H. Kim, Surf. Coat. Technol., 161, 237 (2002) https://doi.org/10.1016/S0257-8972(02)00474-7
  2. L. Chollet and A. J. Perry, Thin Solid Films, 123, 223 (1985) https://doi.org/10.1016/0040-6090(85)90162-2
  3. C. Rebholz, A. Leyland and A. Matthews, Thin Solid Films, 343, 242 (1999) https://doi.org/10.1016/S0040-6090(98)01635-6
  4. J. A. Sue and H. H. Troue, Surf. Coat. Technol., 43, 709 (1990) https://doi.org/10.1016/0257-8972(90)90014-4
  5. R. Goller, P. Torri, M. A. Baker, R. Gilmore and W. Gissler, Surf. Coat. Technol., 120, 453 (1999) https://doi.org/10.1016/S0257-8972(99)00466-1
  6. H. P. Lorenz, Diamond and Related Mater., 4, 1088(1995) https://doi.org/10.1016/0925-9635(95)00282-0
  7. E. W. Niu, L. Li, G. H. Lv, H. Chen, X. Z. Li, X. Z. Yang and S. Z. Yang, Appl. Sur. Sci., 254, 3909 (2008) https://doi.org/10.1016/j.apsusc.2007.12.022
  8. Ph. V. Kiryukhantsev-Korneev, D. V. Shtansky, M. I. Petrzhik, E. A. Levashov and B. N. Mavrin, Surf. Coat. Technol., 201, 6143 (2007) https://doi.org/10.1016/j.surfcoat.2006.08.133
  9. J. Morales-Hernandez, L. Garcia-Gonzalez, J. Munoz-Saldana and F. J. Espinoza-Beltran, Vacuum, 76, 161 (2004) https://doi.org/10.1016/j.vacuum.2004.07.059
  10. J. S. Yoon, H. J. Kim, J. G. Han and Keon Song, J. of the Korean Inst. of Met.& Mater., 34, 192 (1996)
  11. Q. Yang, D. Y. Seo, L. R. Zhao and X. T. Zeng, Surf. Coat. Technol., 188, 168 (2004) https://doi.org/10.1016/j.surfcoat.2004.08.012
  12. F. Quesada, A. Marino and E. Restrepo, Surf. Coat. Technol., 201, 2925 (2006) https://doi.org/10.1016/j.surfcoat.2006.06.018
  13. H. C. Barshilia, K. S. Rajam, A. Jain, K. Gopinadlhan and S. Chaudhary, Thin Solid Films, 503, 158 (2006) https://doi.org/10.1016/j.tsf.2005.12.074
  14. F. Hollstein, R. Wiedemann and J. Scholz, Surf. coat. Technol., 162, 261 (2003) https://doi.org/10.1016/S0257-8972(02)00671-0
  15. L. Hultman, G. Hakanson, U. Wahlstrom, J. E. Sundgren, I. Petrov, F. Adibi and J. E. Green, Thin Solid Films, 205, 153 (1993) https://doi.org/10.1016/0040-6090(91)90297-B
  16. J. E. Sundgren, Thin Solid Films, 128, 21 (1985) https://doi.org/10.1016/0040-6090(85)90333-5
  17. J. G. Kim and W. S. Hwang, Corro. Sci. and Technol., 5, 52 (2006)
  18. G. S. Kim, B. S. Kim and S. Y. Lee, J. Kor. Inst. Surf. Eng., 38, 207-211 (2005)
  19. S. Liscano, L. Gil, O. A. Leon, M. Cruz and M. H. Staia, Surf. Coat. Technol., 201, 4419 (2006) https://doi.org/10.1016/j.surfcoat.2006.08.056