Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Machining of Micro Structure using Elliptical Vibration Grooving Machine

타원궤적 진동절삭 가공기를 이용한 미세 형상 가공

  • Kim, Gi-Dae (School of Mechanical and Automotive Engineering, Catholic Univ. of Daegu) ;
  • Loh, Byoung-Gook (Department of Mechanical Systems Engineering, Hansung Univ.)
  • 김기대 (대구가톨릭대학교 기계자동차공학부) ;
  • 노병국 (한성대학교 기계시스템공학과)
  • Published : 2008.11.01
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Abstract

Successive micro-scale V-grooves and a grid of pyramids were machined by elliptical vibration tufting (EVC) to investigate feasibility of using EVC as an alternative method of creating micro-molds to photo-lithography and electroforming, which have been commonly employed. An elliptical vibration grooving machine was developed which consists of two orthogonally-arranged piezoelectric actuators, a diamond cutting tool, and a motorized xyz stage. The micro-scale features were machined on materials of copper, duralumin, nickel, and hastelloy and it was found that EVC significantly reduces cutting resistance and prohibits generation of side burrs and rollover burrs, thus resulting in improving machining qualify of micro-molds in ail experimented workpiece materials.

Keywords

References

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