Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Command Generation Method for High-Speed and Precise Positioning of Positioning Stage

위치결정 스테이지의 고속 정밀 위치결정을 위한 입력성형명령 생성 기법

  • Jang, Joon-Won (Department of Mechatronics, Kumoh National Institute of Technology) ;
  • Park, Sang-Won (Department of Mechatronics, Kumoh National Institute of Technology) ;
  • Hong, Seong-Wook (School of Mechanical Engineering, Kumoh National Institute of Technology)
  • 장준원 (금오공과대학교 기전공학과) ;
  • 박상원 (금오공과대학교 기전공학과) ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • Published : 2008.10.01
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Abstract

This paper deals with precise positioning of a high-speed positioning stage without inducing residual vibration by using an input shaping technique. Input shaping is well known to be a very effective tool for suppressing the residual vibration of flexible structures. However, the ordinary input shaping for positioning stages is designated mostly for velocity regulation, not for the residual vibration at the target position. The main difficulties in implementing input shaping along with precise positioning are the time delay caused by the servo system characteristics and the s-curve feature often employed in some motor controllers. This paper analyzes the dynamic responses of a single-mode-dominate stage system subjected to input shaping. A theoretical model is developed io investigate the nature of system. In order to overcome the difficulty, this paper proposes an improved input shaper based on modified command profile generation. The proposed method is proved effective through experiments and simulations.

Keywords

References

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