SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks

  • Maeng, Sung-Lyul (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Guha, Prasanta (Centre for Advanced Photonics & Electronics, University of Cambridge) ;
  • Udrea, Florin (Centre for Advanced Photonics & Electronics, University of Cambridge) ;
  • Ali, Syed Z. (Centre for Advanced Photonics & Electronics, University of Cambridge) ;
  • Santra, Sumita (Centre for Advanced Photonics & Electronics, University of Cambridge) ;
  • Gardner, Julian (School of Engineering, University of Warwick) ;
  • Park, Jong-Hyurk (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Kim, Sang-Hyeob (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Moon, Seung-Eon (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Park, Kang-Ho (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Kim, Jong-Dae (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Choi, Young-Jin (Centre for Advanced Photonics & Electronics, University of Cambridge) ;
  • Milne, William I. (Centre for Advanced Photonics & Electronics, University of Cambridge)
  • Received : 2008.02.22
  • Accepted : 2008.05.02
  • Published : 2008.08.30

Abstract

This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at $200^{\circ}C$ and showed a good response to 100 ppb $NO_2$ gas.