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High Power and Single Mode Lasing Characteristics in Vertical Cavity Surface Emitting Laser by Varying Photonic Bandgap Structures

광 결정 구조 변수에 따른 고출력 단일모드 수직공진 표면발광 레이저의 발진 특성

  • 이진웅 (세종대학교 전자정보통신공학부 광전자공학과) ;
  • 현경숙 (세종대학교 전자정보통신공학부 광전자공학과) ;
  • 신현의 (옵티시스(주) 신소자 개발팀) ;
  • 김희대 (옵티시스(주) 신소자 개발팀)
  • Published : 2009.12.25

Abstract

The high power and single mode vertical cavity surface emitting laser(VCSEL)s with photonic crystal structures have been proposed and fabricated by reducing substantially the hole numbers used in the photonic crystal structures. It is found that only six holes enable VCSELs to operate a single mode and the reliability can be enhanced by filling the holes with polyimide. The single mode lasing characteristics were analyzed by varying the oxide aperture and the hole diameter in photonic crystal structures. As a result, the single mode lasing can be stably obtained in the photonic crystal vertical cavity surface emitting lasers.

결정을 이용하여 고출력 단일모드 특성을 가지는 수직공진 표면발광 레이저를 제작하고 발진 특성을 관찰하였다. 일반적으로 광 밴드갭 형성을 위해 수십개의 광 결정 홀을 식각하나, 이번 연구에서는 6개의 홀만으로 단일모드를 구현하였고, 폴리이미드로 홀을 메우게 되어 신뢰성이 유리한 장점이 있다. 산화 구경과 광 결정 홀의 크기를 변화시키며 실험을 진행하여 단일모드 특성의 변화를 분석하였다. 다양한 광 결정 구조를 가진 수직공진 표면발광 레이저에서 고출력 단일모드 발진이 가능함을 확인하였다.

Keywords

References

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