Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Development of Focused Ion Beam Column Using Ga Source

갈륨 소스를 이용한 집속이온빔 컬럼 개발

  • Published : 2009.03.01
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Abstract

Focused ion beam system was designed, which includes LMIS, electrostatic lens and high voltage power supply. Control program is updated for high speed image processing. The details of vibration-free vacuum system and other important electrical parts were trouble-shooted for appropriately controlling high acceleration voltages.

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References

  1. Kyoung-Hwan Hwang, Eun-Ha Choi, Yoon-Ho Seo, Gwang-Sub Cho and Seung-Un Kang, 1994,"Measurement of Focused Ion Beam Size,” Korea Applied Physics, Vol.7, No.6, pp. 523-527
  2. Gary A. Glass, Bibhudutta Rout, Alexander D. Dymnikov and Elia V. Eschenazi, 2006, “High Energy Focused Ion Beam Nanoprobes: Design and Applications,” Mater. Res. Soc. Symp. Proc. Vol. 908E, pp. 68-80
  3. Kenji Kurihara, 1984, “Low-Aberration Einzel Lens for a Focused-Ion-Beam System,” Japanes Journal of Applied Physics, Vol. 24, No. 2, pp. 225-230 https://doi.org/10.1143/JJAP.24.225
  4. Kiyoshi Sakaguchi and Tetsu Sekine, 1998, “Focused Ion Beam Optical Column Design and Consideration on Minimum Attainable Beam Size,” J. Vac. Sci. Technol. B, Vol. 16, No. 4, pp. 2462-2468 https://doi.org/10.1116/1.590191
  5. Toru Itakura, Kei Horiuchi and Sumio Yamamoto, 1984, “Design and Fabrication of a 50kV Ion Beam Column,” Fujitsu Sci., Tech. J., Vol. 20, No. 4, pp. 447-465
  6. Tohru Ishitani, 1995, “Coarseguidelines in Gesigning Focused Ion Beam Optics,”J. Vac. Sci. Technol. B, Vol. 13, No. 2, pp. 371-374 https://doi.org/10.1116/1.587948
  7. R. AIHARA, H. SAWARAGI, B. THOMPSON and M.H. SHEARER, 1989, “Development of Focused Ion Beam System,” Nuclear Instruments and Methods in Physics Research, B37/38,pp. 212-217 https://doi.org/10.1016/0168-583X(89)90172-9
  8. Jon Orloff and Pierre Sudraud' “Design of a 100kV, High Resolution Focused Ion Beam Column with a Liquid Metal Ion Source,” Microelectronic Engineering, Vol. 3, pp. 161-165 https://doi.org/10.1016/0167-9317(85)90023-1