The Journal of Korean Institute of Electromagnetic Engineering and Science (한국전자파학회논문지)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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High Stability and High Efficiency Power Amplifier with Switchable Damper for Plasma Applications

플라즈마 응용을 위한 선택적 감쇠기를 사용한 고안정 고효율 전력증폭기

  • Kim, Ji-Yeon (Department of Wireless Communications Engineering, Kwangwoon University) ;
  • Lee, Dong-Heon (Department of Wireless Communications Engineering, Kwangwoon University) ;
  • Chun, Sang-Hyun (Department of Wireless Communications Engineering, Kwangwoon University) ;
  • Yoo, Ho-Joon (Department of Wireless Communications Engineering, Kwangwoon University) ;
  • Kim, Jong-Heon (Department of Wireless Communications Engineering, Kwangwoon University)
  • Published : 2009.01.31
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Abstract

In this paper, a new 1 kW power amplifier with high efficiency and high stability in a RF generator is designed and fabricated for plasma applications. The efficiency of power amplifier is improved by using class-E amplifier that consists of one push-pull MOSFET and high current drive IC instead of class-C amplifier composed of several single ended MOSFET. Switchable damper that allows selecting three different modes of amplifiers for considering efficiency and stability is added into the amplifier for plasma applications. Stable region of an early electronic discharge section is extended to VSWR of 4.5:1 compared to conventional VSWR of 3.8:1 through using switchable damper. The dimension of the amplifier is also reduced to 30 % of conventional amplifier. The 80 % efficiency of power amplifier with switchable damper is obtained the output power of 1 kW in operating frequency of 13.56 MHz. In comparison of conventional power amplifier for plasma applications, 13 % efficiency is improved.

본 논문에서는 플라즈마 응용을 위 한 고효율 및 고안정성을 가지는 RF 발생기용 1 kW급 전력증폭기를 설계 및 제작하였다. 전력증폭기는 푸쉬풀 MOSFET 1개와 고전류 구동 IC로 구성하였으며, E급 증폭기의 구조를 사용함으로써 효율을 개선하였다. 플라즈마 응용에 적합하도록 전력증폭기에 선택적 감쇠기를 사용하여 3가지 모드로 동작하게 함으로써 효율과 안정성을 선택적으로 고려할 수 있도록 하였다. 초기 방전 구간의 불안정성을 개선하기 위하여 RF 발생기의 출력 안정영역을 선택적 감쇠기를 사용하여 전압정재파비(VSWR)를 3.8:1 미만보다 개선된 4.5:1 미만으로 확장하였다. 또한 기존에 적용되는 증폭기에 비하여 크기를 30 % 줄였으며, 주파수 13.56 MHz, 출력 1 kW에서 효율 80 %를 얻으므로 기존에 비하여 효율을 약 13 % 개선하였다.

Keywords

References

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