The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design of Electromagnetically Driven Micro Scanning Mirror for Laser Animation System

레이저 디스플레이를 위한 전자력 구동 스캐닝 미러의 설계

  • 이경건 (서울대학교 전기.컴퓨터 공학부) ;
  • 장윤호 (서울대학교 전기.컴퓨터 공학부) ;
  • 유병욱 (서울대학교 전기.컴퓨터 공학부) ;
  • 진주영 (서울대학교 전기.컴퓨터 공학부) ;
  • 임용근 (한국 알엠아이(주)) ;
  • 김용권 (서울대학교 전기.컴퓨터 공학부)
  • Published : 2009.03.01
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Abstract

In this paper, we present the design of an electromagnetic scanning mirror with torsional springs. The scanning mirror consisting of torsional springs and electromagnetic coils was designed for the applications of laser animation systems. We analyzed and optimized three types of torsional springs, namely, straight beam springs (SBS), classic serpentine springs (CSS), and rotated serpentine springs (RSS). The torsional springs were analyzed in terms of electrical resistance, fabrication error tolerance, and resonance mode separation of each type using analytical formula or numerical analysis. The RSS has advantages over the others as follows: 1) A low resistance of conductors, 2) wide resonance mode separation, 3) strong fabrication error tolerance, 4) a small footprint. The double-layer coils were chosen instead of single-layer coils with respect to electromagnetic forces. It resulted in lower power consumption. The geometry of the scanning mirror was optimized by calculations; RSS turn was 12 and the width of double-layer coil was $100{\mu}m$, respectively. When the static rotational angle is 5 degrees, the power consumption of the mirror plate was calculated to be 9.35 mW since the resistance of the coil part and a current is $122{\Omega}$ and 8.75 mA, respectively. The power consumption of full device including the mirror plate and torsional springs was calculated to be 9.63 mW.

Keywords

References

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