Fabrication of superhydrophobic $TiO_2$ thin films by wet process

습식 공정법에 의한 초발수 $TiO_2$ 박막 제조

  • Kim, Jin-Ho (Korea Institute of Ceramic Engineering and Technology, Glass & Display Team) ;
  • Jung, Hyun-Ho (Korea Institute of Ceramic Engineering and Technology, Glass & Display Team) ;
  • Hwang, Jong-Hee (Korea Institute of Ceramic Engineering and Technology, Glass & Display Team) ;
  • Lim, Tae-Young (Korea Institute of Ceramic Engineering and Technology, Glass & Display Team) ;
  • Choi, Duk-Gun (Department of Materials Science, Hanyang University) ;
  • Cheong, Deock-Soo (Department of Materials Science and Engineering, Dankook University) ;
  • Kim, Sae-Hoon (Department of Ceramic Engineering, Gangneung-Wonju National University)
  • 김진호 (한국세라믹기술원 유리 디스플레이팀) ;
  • 정현호 (한국세라믹기술원 유리 디스플레이팀) ;
  • 황종희 (한국세라믹기술원 유리 디스플레이팀) ;
  • 임태영 (한국세라믹기술원 유리 디스플레이팀) ;
  • 최덕균 (한양대학교 신소재공학과) ;
  • 정덕수 (단국대학교 신소재공학과) ;
  • 김세훈 (강릉-원주대학교 세라믹공학과)
  • Published : 2009.10.31

Abstract

Superhydrophobic $TiO_2$ thin films were successfully fabricated on a glass substrate by wet process. Layer-by-layer (LBL) deposition and liquid phase deposition (LPD) methods were used to fabricate the thin films of micro-nano complex structure with a high roughness. To fabricate superhydrophobic $TiO_2$ thin films, the (PAH/PAA) thin films were assembled on a glass substrate by LBL method and then $TiO_2$ nanoparticles were deposited on the surface of (PAH/PAA) thin film by LPD method, Subsequently, hydrophobic treatment using fluoroalkyltrimethoxysilane (FAS) was carried out on the surface of prepared $TiO_2$ thin films. The $TiO_2$ thin film fabricated with 45 minutes immersion time on $(PAH/PAA)_{10}$ showed the RMS roughness of 65.6nm, water contact angel of $155^{\circ}$ and high transmittance of above 80% (>650nm in wavelength) after the hydrophobic treatment. The Surface morphologies, optical properties and contact angel of prepared thin films with different experimental conditions were measured by field emission scanning electron microscope (FE-SEM), atomic force microscope (AFM), UV-Vis spectrophotometer and contact angle meter.

초발수 $TiO_2$ 박막을 습식 공정법에 의해 유리 기판 위에 성공적으로 제조하였다. Micro-nano 복합구조의 거친 표면을 갖는 박막을 제조하기 위하여 layer-by-layer(LBL) deposition 법과 liquid phase deposition(LPD) 법이 이용되었다. 초발수 박막은 LBL 법에 의해 texture 구조를 갖는(PAH/PAA) 박막을 제조 한 후 그 위에 LPD 법에 의해 $TiO_2$ 나노 입자를 적층시키고 그 표면을 fluoroalkyltrimethoxysilane(FAS)를 사용하여 발수 처리를 하여 제조하였다. $(PAH/PAA)_{10}$ 박막의 표면에 45분 동안 $TiO_2$를 적층한 박막은 RMS roughness가 65.6 nm로 거친 표면을 보여주었고 발수 처리 이후에 접촉각 $155^{\circ}$ 정도의 초발수 특성과 함께 파장 650 nm 이상에서는 80% 이상의 투과율을 보여주었다. 서로 다른 조건에서 제조된 박막의 표면 구조,광학적 특성, 접촉각을 FE-SEM, AFM, UV-Vis, contact angel meter를 이용하여 측정하였다.

Keywords

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