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Fabrication of Microlens Array Using Photoresist Thermal Reflow

Photoresist Thermal Reflow를 이용한 Microlens Array 제작

  • 황성기 (영남대학교 물리학과 Display Lab) ;
  • 백상훈 (영남대학교 물리학과 Display Lab) ;
  • 권진혁 (영남대학교 물리학과 Display Lab) ;
  • 박이순 (경북대학교 고분자공학과)
  • Published : 2009.04.25

Abstract

An optical sheet with microlens array (MLA) is designed and fabricated as a substitute for the prism sheets of LCD backlight. Using photoresist thermal reflow, MLAs were fabricated on PET film with thickness of $100{\mu}m$, and we measured the change of MLA profile in terms of exposure time, reflow temperature and reflow time.

PET 필름 위에 LCD 백라이트의 프리즘 집광시트의 역할을 대체 할 수 있는 microlens array(MLA) 시트를 설계하고 제작하였다. Photoresist thermal reflow 공정으로 두께 $100{\mu}m$ PET 필름 위에 MLA를 제작하였고, 노광 시간과 reflow의 온도, 시간 등의 변수에 따른 MLA의 형상 변화를 측정하였다.

Keywords

References

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