Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Synthesis of Acrylate Binders for Negative Photoresist

네가티브 포토레지스트용 아크릴레이트계 바인더 합성

  • Kim, Nan-Soo (Dept. of Applied Chemical Engineering, Korea University of Technology and Education) ;
  • Nam, Byeong-Uk (Dept. of Applied Chemical Engineering, Korea University of Technology and Education)
  • 김난수 (한국기술교육대학교 응용화학공학과) ;
  • 남병욱 (한국기술교육대학교 응용화학공학과)
  • Published : 2009.09.30
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Abstract

In this study, we synthesized novel UV-curable binders and applied for negative photoresist of display device. First, we synthesized UV-curable binders by radical polymerization with a mixture of Styrene/Methyl methacrylate/Methacrylic acid/Glycidyl methacrylate/N-Cyclohexylmaleimide at a fixed composition. Following the first step, we prepared a negative photoresist mixture optimized with photo sensitive initiator and others for the litho test. And then, we studied resolution and film retention with molecular weight of each binders and numerical value of Alkaline Desolution Rate(ADR). As a result of the litho test, we found that if the novel polymers have same numerical value of ADR, the resolution decreased and the film retention increased with the increasing of molecular weight of photoresist binder.

Keywords

References

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