Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Characterization of Surface Morphology and Light Scattering of Transparent Conducting ZnO:Al Films as Front Electrode for Silicon Thin Film Solar Cells

실리콘 박막 태양전지 전면 전극용 ZnO : Al 투명전도막의 표면형상 및 산란광 특성

  • Kim, Young-Jin (Photovoltaic Research Center, Korea Institute of Energy Research) ;
  • Cho, Jun-Sik (Photovoltaic Research Center, Korea Institute of Energy Research) ;
  • Lee, Jeong-Chul (Photovoltaic Research Center, Korea Institute of Energy Research) ;
  • Wang, Jin-Suk (Semiconductors and circuit system, Chungnam National University) ;
  • Song, Jin-Soo (Photovoltaic Research Center, Korea Institute of Energy Research) ;
  • Yoon, Kyung-Hoon (Photovoltaic Research Center, Korea Institute of Energy Research)
  • 김영진 (한국에너지기술연구원 태양광연구단) ;
  • 조준식 (한국에너지기술연구원 태양광연구단) ;
  • 이정철 (한국에너지기술연구원 태양광연구단) ;
  • 왕진석 (충남대학교 전자전파정보통신공학과) ;
  • 송진수 (한국에너지기술연구원 태양광연구단) ;
  • 윤경훈 (한국에너지기술연구원 태양광연구단)
  • Published : 2009.05.27
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Abstract

Changes in the surface morphology and light scattering of textured Al doped ZnO thin films on glass substrates prepared by rf magnetron sputtering were investigated. As-deposited ZnO:Al films show a high transmittance of above 80% in the visible range and a low electrical resistivity of $4.5{\times}10^{-4}{\Omega}{\cdot}cm$. The surface morphology of textured ZnO:Al films are closely dependent on the deposition parameters of heater temperature, working pressure, and etching time in the etching process. The optimized surface morphology with a crater shape is obtained at a heater temperature of $350^{\circ}C$, working pressure of 0.5 mtorr, and etching time of 45 seconds. The optical properties of light transmittance, haze, and angular distribution function (ADF) are significantly affected by the resulting surface morphologies of textured films. The film surfaces, having uniformly size-distributed craters, represent good light scattering properties of high haze and ADF values. Compared with commercial Asahi U ($SnO_2$:F) substrates, the suitability of textured ZnO:Al films as front electrode material for amorphous silicon thin film solar cells is also estimated with respect to electrical and optical properties.

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