DOI QR코드

DOI QR Code

Factors to Influence Thermal-Cycling Reliability of Passivation Layers in Semiconductor Devices Utilizing Lead-on-Chip (LOC) Die Attach Technique

리드 온 칩 패키징 기술을 이용하여 조립된 반도체 제품에서 패시베이션 박막의 TC 신뢰성에 영향을 미치는 요인들

  • Lee, Seong-Min (Department of Materials Science & Engineering, University of Incheon) ;
  • Lee, Seong-Ran (Division of Health, Kongju National University)
  • 이성민 (인천대학교 신소재공학부) ;
  • 이성란 (공주대학교 보건학부)
  • Published : 2009.05.27

Abstract

This article shows various factors that influence the thermal-cycling reliability of semiconductor devices utilizing the lead-on-chip (LOC) die attach technique. This work details how the modification of LOC package design as well as the back-grinding and dicing process of semiconductor wafers affect passivation reliability. This work shows that the design of an adhesion tape rather than a plastic package body can play a more important role in determining the passivation reliability. This is due to the fact that the thermal-expansion coefficient of the tape is larger than that of the plastic package body. Present tests also indicate that the ceramic fillers embedded in the plastic package body for mechanical strengthening are not helpful for the improvement of the passivation reliability. Even though the fillers can reduce the thermal-expansion of the plastic package body, microscopic examinations show that they can cause direct damage to the passivation layer. Furthermore, experimental results also illustrate that sawing-induced chipping resulting from the separation of a semiconductor wafer into individual devices might develop into passivation cracks during thermal-cycling. Thus, the proper design of the adhesion tape and the prevention of the sawing-induced chipping should be considered to enhance the passivation reliability in the semiconductor devices using the LOC die attach technique.

Keywords

References

  1. S. M. Lee and K. W. Lee, Jpn. J. Appl. Phys., 41, 5465 (1996)
  2. S. M. Lee, Jpn. J. Appl. Phys, 45(10A), 7677 (2006) https://doi.org/10.1143/JJAP.45.7677
  3. S. M. Lee, Met. Mater Int., 11(1), 89 (2005) https://doi.org/10.1007/BF03027490
  4. M. Lamson, D. Edwards, S. Groothuis and G. Heine, in Proceedings of the IEEE 45 ECTC (Las Vegas, Nerada, May, 1995) p.1045
  5. Z. Q. Jiang, Y. Huang and A. Chandra, J. of Electronic Packaging, 119, 127 (1997) https://doi.org/10.1115/1.2792218