Fuzzy Controller Design for a Nano Precision Stage Driven by a PZT

PZT 구동 나노 정밀도 스테이지를 위한 퍼지 제어기 개발

  • 하호진 (LG전자 RMC사업부 생산기술그룹) ;
  • 정규원 (충북대학교 기계공학부)
  • Published : 2009.04.15

Abstract

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

Keywords

References

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