Design of Non-stick Micromanipulation for Handling of Micro particle

초소형 부품 조작을 위한 Non-stick 마이크로 매니퓰레이션 시스템의 설계

  • 인용석 (성균관대학교 기계공학부) ;
  • 김유창 (성균관대학교 기계공학부) ;
  • 최혁렬 (성균관대학교 기계공학부) ;
  • 이상무 (한국생산기술연구원 로봇연구본부) ;
  • 구자춘 (성균관대학교 기계공학부)
  • Received : 2009.05.29
  • Accepted : 2009.08.17
  • Published : 2009.08.31

Abstract

In the high precision robot systems, the most popular tasks may be handling of micro-scale objects on a surface such as a micromanipulation robot system. In handling of micro-scale objects, the stiction effect becomes a fundamental issue since the micro-contact mechanics dominates the micromanipulation robot system. In the paper, a theoretical non-stick condition derived from the micro-contact mechanics is carried out for the propose of micro-scale object manipulation. To verify the non-stick condition, a micro-manipulation robot system equipped with a high precision stage system and a microscope system is developed. Experimental results show that the proposed non-stick condition guarantees successful micro-scale object manipulation.

Acknowledgement

Supported by : 지식경제부

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