Design of Non-stick Micromanipulation for Handling of Micro particle

초소형 부품 조작을 위한 Non-stick 마이크로 매니퓰레이션 시스템의 설계

  • 인용석 (성균관대학교 기계공학부) ;
  • 김유창 (성균관대학교 기계공학부) ;
  • 최혁렬 (성균관대학교 기계공학부) ;
  • 이상무 (한국생산기술연구원 로봇연구본부) ;
  • 구자춘 (성균관대학교 기계공학부)
  • Received : 2009.05.29
  • Accepted : 2009.08.17
  • Published : 2009.08.31


In the high precision robot systems, the most popular tasks may be handling of micro-scale objects on a surface such as a micromanipulation robot system. In handling of micro-scale objects, the stiction effect becomes a fundamental issue since the micro-contact mechanics dominates the micromanipulation robot system. In the paper, a theoretical non-stick condition derived from the micro-contact mechanics is carried out for the propose of micro-scale object manipulation. To verify the non-stick condition, a micro-manipulation robot system equipped with a high precision stage system and a microscope system is developed. Experimental results show that the proposed non-stick condition guarantees successful micro-scale object manipulation.


Supported by : 지식경제부


  1. A. Schubert, R. Neugebauer, and B. Schulz, "System Concept and Innovative Component Design for Ultra-Precision Assembly Processes," Proceedings of the 11th International Conference on Precision Engineering, Tokyo, Japan, August 2006.
  2. Arianna Menciassi, Anna Eisinberg, Ivano Izzo, and Paolo Dario, "From "Macro" to "Micro" Manipulation: Models and Experiments," IEEE/ASME Transactions on mechatronics, vol. 9, no. 2, pp. 311-320, 2004.
  3. D. Boley, and R. Maier, "Force-Guided Assembly of Micro Mirrors," Proceedings of the 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems, Las Vegas, Nevada, October 2003.
  4. Van de Venn, and H.-W, "Microassembly-Current development trends and new assembly paradigms," van de venn.pdf
  5. E. Shimada, J.A. Thompson, J. Yan, R. Wood, and R.S. Fearing, "Prototyping Millirobots Using Dextrous Microassembly and Folding," Proceedings of the 2000 ASME International Mechanical Engineering Congress and Exposition, Orlando, Florida, November 2000.
  6. Afshin Tafazzoli, Chytra Pawashe, and Metin Sitti, "Atomic Force Microscope based Two-Dimensional Assembly of Micro/Nanoparticles," Proceedings of the 6th IEEE International Symposium on Assembly and Task Planning, Montreal, Canada, July 2005.
  7. Nicholas A. Lynch, Cagdas Onal, Eugenio Schuster, and Metin Sitti, "A Strategy for Vision-Based Controlled Pushing of Microparticles," Proceedings of the 2007 IEEE International Conference on Robotics and Automation, Roma, Italy, April 2007.
  8. Cagdas Denizel Onal, and Metin Sitti, "Visual Servoing-Based Autonomous 2-D Manipulation of Microparticles Using a Nanoprobe," IEEE Transactions on control systems technology, vol. 15, no. 5, pp. 842-852, September 2007.
  9. Guangyong Li, Ning Xi, Mengmeng Yu, and Wai-Keung Fung, "Development of Augmented Reality System for AFM-Based Nanomanipulation," IEEE/ASME Transactions on mechatronics, vol. 9, no. 2, pp. 358-365, June 2004.
  10. Guangyong Li, Ning Xi, Heping Chen, Craig Pomeroy, and Mathew Prokos, ""Videolized" Atomic Force Microscopy for Interactive Nanomanipulation and Nanoassembly," IEEE Transactions on nanotechnology, vol. 4, no. 5, pp. 605-612, September 2005.
  11. Fearing, R.S., "Survey of sticking effects for micro parts handling," Proceedings of the 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems, Pittsburgh, PA, USA, August 1995.
  12. Jian-HuaWu, Gang Zhao, and Jia-Ru Chu, "Influences of environmental humidity on micro object handling efficiency," Journal of micromechanics and microengineering, vol. 17 pp.187-192, 2007.
  13. F. Arai, D. Ando, T. Fukuda, Y. Nonoda, and T. Oota, "Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement," Proceedings of the 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems, Pittsburgh, PA, USA, August 1995.
  14. Yves Rollot, Stephane Regnier, and Jean-Claude Guinot, "Dynamic model for the micro-manipulation by adhesion: experimental validation for determined condition," Journal of micromechatronics, vol. 1, no. 4, pp.273-297, 2002.
  15. H. Krupp, W. Schnabel, and G. Walter, "Lifshitz-van der Waals constant - Computation of Lifshitz-van der Waals constant on basis of optical data," J. Colloid Interface Sci., vol. 39, no. 2, pp. 421-423, 1972.
  16. K. Komvopoulos, "Adhesion and friction forces in microelectromechanical systems: Mechanisms, measurement, surface modification techniques, and adhesion theory," Journal of adhesion science and technology, vol. 17, no. 4, pp. 477-517, 2003.
  17. Y. S. Ihn, S. H. Ryu, B. J. Choi, H. S. Ha, S. M. Lee, H. R. Choi, and J. C. Koo, "An Enhanced Vision Processing Algorithm for a Micromanipulation System," Proceedings of the International Workshop on Robotic and Sensors Environments, Ottawa, ON, Canada, October 2007.
  18. Y. S. Ihn, H. S. Ha, B. J. Choi, H. R. Choi, S. M. Lee and J. C. Koo, "Design of a modified binary region median filtering for micro electronic device assembly manipulations," Proceedings of International Conference on Control, Automation and Systems, Seoul, Korea, October 2007.
  19. Y. S. Ihn, S. H. Ha, S. M. Lee, H. R. Choi, J. C. Koo, "The Binary Recognition Algorithm Using Point Correlation Template," Proceedings of the 4th International Conference on Ubiquitous Robots and Ambient Intelligence, Pohang, Korea, November 2007.