한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제18권3호
  • /
  • Pages.255-260
  • /
  • 2009
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  • 2508-5093(pISSN)
  • /
  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

가상모드 입력성형기를 이용한 위치결정 스테이지 잔류진동 저감

Residual Vibration Reduction of Precise Positioning Stage Using Virtual-Mode Based Input Shapers

  • 서용규 (금오공과대학교 대학원 기전공학과, 탑엔지니어링(주)) ;
  • 장준원 (금오공과대학교 대학원 기전공학과) ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • 발행 : 2009.06.15
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초록

This paper presents an experimental result of virtual mode input shaping for positioning stage. Input shaping is liable to increase the rise time of the system, which often degrades the performance of system. The virtual mode input, shaping is an input shaper design method to improve this problem. Experiments are performed with a precise positioning stage with a flexible beam of which natural frequency is adjustable. The experimental results show that the virtual-mode shaper is useful to reduce the rise time as well as the residual vibration of precise positioning stages.

키워드

참고문헌

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