Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Analysis on the Pressure Rise Characteristics Caused by Movement of Linear and Rotary Stages using Air Bearings in High Vacuum Environment

고진공 환경용 공기베어링이 적용된 직선, 회전스테이지의 구동에 의한 압력증가 특성분석

  • Kim, Gyung-Ho (Intelligent Manufacturing Systems Research Division, KIMM) ;
  • Park, Chun-Hong (Intelligent Manufacturing Systems Research Division, KIMM)
  • 김경호 (한국기계연구원 지능형생산시스템연구본부) ;
  • 박천홍 (한국기계연구원 지능형생산시스템연구본부)
  • Published : 2009.08.01
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Abstract

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

Keywords

References

  1. Kojima, Y., Kitahara, H., Kasono, O., Katsumura, M. and Wada, Y., "High Density Mastering Using Electron Beam," Jpn. J. Appl. Phys., Vol. 37, No. 4B, pp. 2137-2143, 1998 https://doi.org/10.1143/JJAP.37.2137
  2. Furuki, M., Takeda, M., Yamamoto, M., Aki, Y., Kawase, H., Koisumi, M., Takashima, S., Miyokawa, T. and Date, N., "Electron Beam Recording with a Novel Differential Pumping Head Realizing More than 50 GB/Layer Capacity Disc," Jpn. J. Appl. Phys. Part 1, Vol. 42, No. 2B, pp. 759-763, 2003 https://doi.org/10.1143/JJAP.42.759
  3. Kitahara, H., Ozawa, Y., Asai, M., Nishida, T. and Wada, Y., "Electron Beam Recorder with Nanometer-Scale Accuracy for 100Gbit/in2 Density Mastering," Jpn. J. Appl. Phys., Vol. 43, No. 7B, pp. 5068-5073, 2004 https://doi.org/10.1143/JJAP.43.5068
  4. Miura, T., Sato, T., Miyazaki, M., Hada, K., Sato, Y. and Tokunaga, M., "Nikon EPL Tool Development Summary," Proc. SPIE, Vol. 4688, pp. 527-534, 2002 https://doi.org/10.1117/12.472330
  5. Ohtsuka, M., Furukawa, M. and Higomura, M., "The Vertical Traverse Stage in Vacuum Condition," JSME Int. J. Series III, Vol. 33, No. 1, pp. 61-64, 1990
  6. Shinohara, S., Tsuda, T. and Hayashida, T., "Hydrostatic Gas Bearing, Hydrostatic Gas Bearing Device for use in Vacuum Environment, and Gas Recovering Method for the Hydrostatic Gas Bearing Device," US Patent, No. US 2003/0002756, 2003
  7. Khim, G., Park, C.-H., Lee, H. and Kim, S.-W., "Analysis of Additional Leakage Resulting from the Feeding Motion of a Vacuum-Compatible Air Bearing Stage," Vacuum, Vol. 81, No. 4, pp. 466-474, 2006 https://doi.org/10.1016/j.vacuum.2006.06.015
  8. Khim, G., Park, C.-H., Lee, H. and Kim, S.-W., "Performance Analysis of a Vacuum-Compatible Air Bearing," Journal of the KSPE, Vol. 23, No. 10, pp. 103-112, 2006
  9. Bae, S. H., In, S. R., Jung, K. H., Lee, Y. B. and Shin, Y. H., "Vacuum Engineering," The Korea Economic Daily Business Publication, pp. 61-116, 2000
  10. Roth, A., "Vacuum Technology," North-holland, pp. 62-88, 1990
  11. Khim, G., Song, C.-K. and Park, C.-H., "Design and Evaluation of a Rotation Table using Air Bearings for Electron Beam Mastering," Journal of the KSPE, Vol. 25, No. 12, pp. 132-138, 2008