Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis

불소계 플라즈마에 노출된 YAG 세라믹스의 식각거동 및 XPS 분석

  • Kim, Kyeong-Beom (Korea Institute of Ceramic Engineering and Technology(Icheon)) ;
  • Kim, Dae-Min (Korea Institute of Ceramic Engineering and Technology(Icheon)) ;
  • Lee, Jung-Ki (School of Materials Engineering, Inha University) ;
  • Oh, Yoon-Suk (Korea Institute of Ceramic Engineering and Technology(Icheon)) ;
  • Kim, Hyung-Tae (Korea Institute of Ceramic Engineering and Technology(Icheon)) ;
  • Kim, Hyung-Sun (School of Materials Engineering, Inha University) ;
  • Lee, Sung-Min (Korea Institute of Ceramic Engineering and Technology(Icheon))
  • 김경범 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 김대민 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 이정기 (인하대학교 신소재공학부) ;
  • 오윤석 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 김형태 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 김형순 (인하대학교 신소재공학부) ;
  • 이성민 (한국세라믹기술원 이천분원 엔지니어링세라믹센터)
  • Published : 2009.09.30
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Abstract

Chemical composition and status of chemical bonding of the YAG($Y_3Al_5O_{12}$) ceramics after the exposure to fluorine plasma have been investigated using X-ray photoelectron spectroscopy, with the analysis on its erosion behavior. On the surface, F showed the maximum content, decreasing with depth, meanwhile the cation composition remained almost constant, irrespective of the position. The peaks due to Y in the reaction layer consisted of two kinds, showing the Y-O and Y-F bonds. These surface modifications under fluorine plasma seem to promote the erosion of the YAG ceramics. Excess addition of $Al_2O_3$ or $Y_2O_3$ into stoichiometric YAG produced 2nd phases of $Al_2O_3$ and $YAlO_3$, respectively, resulting in the slight difference in the local erosion rates. But, the overall average erosion rate was not sensitive to such excess additions of $Al_2O_3$ or $Y_2O_3$.

Keywords

References

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