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Estimation of Tribological Properties on Surface Modified SiC by Chlorine Gas Reaction at Various Temperatures

다양한 온도에서 염소가스 반응에 의해 표면 개질된 SiC의 트라이볼로지 특성평가

  • Bae, Heung-Taek (Department of Materials Science and Engineering, Korea University) ;
  • Jeong, Ji-Hoon (Department of Materials Science and Engineering, Korea University) ;
  • Choi, Hyun-Ju (Department of Materials Science and Engineering, Korea University) ;
  • Lim, Dae-Soon (Department of Materials Science and Engineering, Korea University)
  • 배흥택 (고려대학교 신소재공학과) ;
  • 정지훈 (고려대학교 신소재공학과) ;
  • 최현주 (고려대학교 신소재공학과) ;
  • 임대순 (고려대학교 신소재공학과)
  • Published : 2009.09.30

Abstract

Carbon layers were fabricated on silicon carbide by chlorination reaction at temperatures between $1000^{\circ}C$ and $1500^{\circ}C$ with $Cl_2/H_2$ gas mixtures. The effect of reaction temperature on the micro-structures and tribological behavior of SiC derived carbon layer was investigated. Tribological tests were carried out ball-on-disk type wear tester. Carbon layers were characterized by X-ray diffractometer, Raman spectroscopy and surface profilometer. Both friction coefficients and wear rates were maintained low values at reaction temperature up to $1300^{\circ}C$ but increased suddenly above this temperature. Variation of surface roughness as a function of reaction temperature was dominant factor affecting tribological transition behavior of carbon layer derived from silicon carbide at high temperature.

Keywords

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